“…According to Ref. [9], such a high increase of the capacitance at RH > 85% is related to both the change of the dielectric conductivity and a surface spreading charge, i.e., an effective increase of the electrode area at the dielectric surface, which is impossible to account quantitatively. Indeed, the capacitance of the structures at RH = 100% is a parameter proportional to the area S Ox of the Ox (Fig.…”