Mixed-mode self-calibrated amplitude control scheme for MEMS vibratory gyroscopes

Sawaby, Ahmed; Ahmed, Amr; Abo-Zeid, M.; Ali, Hassan; Aboudina, Mohamed M.

doi:10.1109/newcas.2016.7604770

Cited by 2 publications

(1 citation statement)

References 6 publications

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“…For drive mode, the Phase-locked Loop (PLL) method [ 18 ] is usually used to control the drive frequency’s stability. The Automatic Gain Control (AGC) method [ 19 ] is used to keep the amplitude of the drive-axis displacement constant. For sense mode, the Closed-loop Detection method [ 20 ] is used to ensure that the proof mass always vibrates near the equilibrium position.…”

Section: Methodsmentioning

confidence: 99%

PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

Tong

Liu

et al. 2018

Sensors

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With an aim to reduce the cost of prototype development, this paper establishes a PSPICE hybrid model for the simulation of capacitive microelectromechanical systems (MEMS) gyroscopes. This is achieved by modeling gyroscopes in different modules, then connecting them in accordance with the corresponding principle diagram. Systematic simulations of this model are implemented along with a consideration of details of MEMS gyroscopes, including a capacitance model without approximation, mechanical thermal noise, and the effect of ambient temperature. The temperature compensation scheme and optimization of interface circuits are achieved based on the hybrid closed-loop simulation of MEMS gyroscopes. The simulation results show that the final output voltage is proportional to the angular rate input, which verifies the validity of this model.

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Section: Methodsmentioning

confidence: 99%