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Sandel, B. R.; Broadfoot, A. L.; Curtis, C. C.; King, Robert A.; Stone, Tom; Hill, R.H.; Chen, J.; Siegmund, Oswald H. W.; Raffanti, R.; Allred, David D.; Turley, R. Steven; Gallagher, D. L.

doi:10.1023/a:1005263510820

Cited by 159 publications

(31 citation statements)

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“…This light can be reflected by a single layer and is difficult to be filtered out by a standard multilayer mirror. For instance, the EUV telescope for solar observation has to reject certain longer wavelength emission lines 74,75 or the whole range from UV to visible light 76 to block the background. High harmonic sources require dedicated optics to select specific XUV spectral components, while rejecting the drive laser light and low orders of harmonics.…”

Section: High Spectral Purity ML Mirrorsmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Section: High Spectral Purity ML Mirrorsmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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“…Increasing both the signal-to-noise and Earth the duration of the observations reveals contributions that are not identifiable using other approaches. 3. The ability to probe the mechanisms that control the evolution of planetary atmospheres.…”

Section: Benefits Of the Geospace Dynamics Observatory Missionmentioning

confidence: 99%

“…The EUV imager concept is based on the IMAGE EUV Imager. 3 The wavelengths, and the spectral, spatial and temporal resolution, are selected to effectively probe the critical interface regions between the Earth's magnetosphere, its ionosphere/thermosphere, and its plasmasphere. This combination provides the key observations to investigate (1) the connections between the Earth's upper atmosphere and the Sun, (2) the dynamics between the neutral dominated region of Earth's upper atmosphere and the plasma dominated region of the ionosphere/thermosphere, and (3) the mechanisms that control the evolution of planetary atmospheres.…”

Section: Instrumentsmentioning

confidence: 99%

The Geospace Dynamics Observatory: a paradigm-changing geospace mission

et al. 2013

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The Geospace Dynamics Observatory (GDO) mission observes the near-Earth region in space called Geospace with unprecedented resolution, scale and sensitivity. At a distance of 60 Earth Radii (Re) in a near-polar circular orbit and a ~27-day period, GDO images the earth's full disk with (1) a three-channel far ultraviolet imager, (2) an extreme ultraviolet imager of the plasmasphere, and (3) a spectrometer in the near to far ultraviolet range that probes any portion of the disk and simultaneously observes the limb.The exceptional capabilities of the GDO mission include (1) unprecedented improvement in signal to noise for globalscale imaging of Earth's space environment that enable changes in the Earth's space environment to be resolved with orders of magnitude higher in temporal and spatial resolution compared to existing data and other approaches, and (2) unrivaled capability for resolving the temporal evolution, over many days, in local time or latitude with a continuous view of Earth's global-scale evolution while simultaneously capturing the changes at scales smaller than are possible with other methods.This combination of new capabilities is a proven path to major scientific advances and discoveries. The GDO mission (1) has the first full disk imagery of the density and composition variability that exist during disturbed "storm" periods and the circulation systems of the upper atmosphere, (2) is able to image the ionosphere on a global and long time scale basis, (3) is able to probe the mechanisms that control the evolution of planetary atmospheres, and (4) is able to test our understanding of how the Earth is connected to the Sun. This paper explores the optical and technical aspects of the GDO mission and the implementation strategy. Additionally, the case will be made that GDO addresses a significant portion of the priority mission science articulated in the recent Solar and Space Physics Decadal Survey. 1

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“…For the 30 nm region, the Mo/Si system has been commonly employed because of its high time and thermal stability [2,3]. Because of its recent development, the Mg/SiC system has been little characterized.…”

Section: Introductionmentioning

confidence: 99%

“…Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers H. Maury a(1,2) , P. Jonnard (1,2) , K. Le Guen (1,2) , J.-M. André (1,2) , Z. Wang (3) , J. Zhu (3) , J. Dong (1,2,3) , Z. Zhang (3) , F. Bridou (4) , F. Delmotte (4) , C. Hecquet (4) , N. Mahne (5) , A. Giglia (5) , and S. Nannarone …”

mentioning

confidence: 99%