Mo/Au Bilayers Deposited by Sputtering at Room Temperature for Transition Edge Sensors Fabrication

González-Arrabal, R.; Camón, A.; Parra-Borderías, María; Fàbrega, L.; Anguita, José V.; Sesé, J.; Briones, F.

doi:10.1007/s10909-007-9638-9

Cited by 11 publications

(6 citation statements)

References 16 publications

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“…We carried out PIXE experiments to detect the presence of Ar, a common impurity in coatings deposited by sputtering. The results (not shown) reveal that the Ar content in the coatings is ∼0.04%, notably lower than typical reported values (∼2%) [35,36].…”

Section: Microstructurecontrasting

confidence: 57%

Morphological and microstructural characterization of nanostructured pure α-phase W coatings on a wide thickness range

Gordillo

Panizo-Laiz

Tejado

et al. 2014

Applied Surface Science

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Nanostructured tungsten (nanoW) coatings have been deposited by DC magnetron sputtering. First, the influence of the sputtering power on the adhesion of the coatings to the substrate was investigated by depositing coatings at powers varying from 30 up to 220 W. Non-delaminated coatings were achieved at powers ≤50 W. Second, the influence of coating thickness on the morphological, microstructural and mechanical properties was investigated for films deposited at 50 W with thicknesses varying from 30 nm up to ∼4.0 m. SEM images reveal that all the films are highly compact, consisting of nanometer sized columns that grow perpendicular to the substrate. XRD data evidence that films are monophasic, being made of pure ␣phase. All coatings show compressive stress and low micro-strain. Nanoindentation tests show that coatings have a hardness higher than that reported for coarse grained W. No significant dependence of the previous properties on coating thickness was observed. Finally, the influence of the substrate on coatings properties was studied, by depositing a W coating at a power of 50 W on a commercial steel substrate: no significant dependence was found.

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Section: Microstructurecontrasting

confidence: 57%

Morphological and microstructural characterization of nanostructured pure α-phase W coatings on a wide thickness range

Gordillo

Panizo-Laiz

Tejado

et al. 2014

Applied Surface Science

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“…No impurity traces have been detected by RBS, with the exception of an atomic percentage of argon (> 2%) [20], which appears to become higher with increasing V c . However, the density of the incorporated Ar atoms is very small that they cannot be considered to be the main factor that is responsible for the measured changes in ρ res (55% of increase between the films deposited at 248 and 965 V).…”

Section: B Normal-state Resistivitymentioning

confidence: 84%

“…thin films [1]- [20]. The most used techniques are sputtering (dc and RF) and electron-beam (e-beam) evaporation.…”

mentioning

confidence: 99%

Effects of Stress and Morphology on the Resistivity and Critical Temperature of Room-Temperature-Sputtered Mo Thin Films

Fàbrega

Fernández-Martínez

Parra-Borderías

et al. 2009

IEEE Trans. Appl. Supercond.

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We report on the structural and electrical characterization of Mo thin films deposited at room temperature by RF magnetron sputtering. The effect of RF power on the morphology and residual stress of the films is analyzed. The films are under compressive stress and consist of densely packed columns with a lateral size on the order of 20 nm. The stress, critical temperature, and resistivity of the films are found to rise when increasing the ejected ion energy during the sputtering process. The changes in critical temperature and resistivity are discussed in terms of the observed morphology and stress changes.

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“…Because Mo is insoluble with noble metals and Au is resistant to corrosion, we selected these materials for TES fabrication. The superconducting properties of Mo/Au bilayers have been analyzed in many laboratories [4]- [6]. The superconducting properties of Mo films, and the transparency of the S/N interface, are influenced strongly by the microfabrication process.…”

Section: A Mo/au Bilayermentioning

confidence: 99%

Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope

Yefremenko

Ade

Aird

et al. 2013

IEEE Trans. Appl. Supercond.

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Abstract-We present information about the design and fabrication of 90 GHz Transition Edge Sensor (TES) detectors deployed in the SPTpol camera for investigation of the cosmicutilized to obtain a TES operating temperature between 520 and 540 mK. Excellent superconducting properties (transition width < 1 mK) and T c uniformity (< 3 mK) across 2 wafers were achieved by sputtering in a confocal system under a single vacuum using an independent RF bias applied to the substrate. Superconducting Nb dots patterned on the TES surface provided controllable broadening of the transition width. We report the results of transition measurements, along with characterization of film morphology.

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Mo/Au Bilayers Deposited by Sputtering at Room Temperature for Transition Edge Sensors Fabrication

Cited by 11 publications

References 16 publications

Morphological and microstructural characterization of nanostructured pure α-phase W coatings on a wide thickness range

Morphological and microstructural characterization of nanostructured pure α-phase W coatings on a wide thickness range

Effects of Stress and Morphology on the Resistivity and Critical Temperature of Room-Temperature-Sputtered Mo Thin Films

Design and Fabrication of 90 GHz TES Polarimeter Detectors for the South Pole Telescope

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