Nanoscale devices made using two-dimensional
(2D) materials, including
transition-metal dichalcogenides (TMDs) such as molybdenum disulfide
(MoS2), are currently being explored for various applications,
e.g., optoelectronic devices, water desalination membranes, and DNA
sequencing. In such applications, defects and nanopores play a key
role in modulating the 2D material’s physicochemical properties,
e.g., the band gap, chemical reactivity, catalytic activity, and molecular/ionic
permeation rate. However, there exists a lack of a fundamental understanding
of nanopore formation in TMDs, especially MoS2. In this
work, we elucidate the mechanism of nanopore formation in 2D MoS2 using an extensive set of first-principles density functional
theory (DFT) calculations. We calculate the energies of etching of
atoms using DFT and use Marcus theory for atom-transfer reactions
to convert the energies to activation barriers. We postulate the role
of silicon as an etchant and show that the MoS6 vacancy
can be a potential nucleation site for the growth of nanopores in
MoS2. By fitting our kinetic predictions to experimental
microscopy data on the formation time of a MoS6 vacancy,
we show that the intrinsic barrier for the etching of atoms in MoS2, as described by Marcus theory, is 0.228 eV in the presence
of silicon atoms. We find that the slowest step in the formation of
the MoS6 vacancy is the step leading from a S5 vacancy to a S6 vacancy, with an activation barrier of
∼0.85 eV. This allows atoms to be etched at close to room-temperature
conditions (27 °C) under the action of an electron beam that
can move around the silicon etchant atoms. Using this new understanding
of the nanopore formation process, researchers will be able to accurately
model the controlled fabrication of nanopores in 2D MoS2.