Model of a Micromechanical Mode-Localized Accelerometer with an Initially Curved Microbeam as a Sensitive Element

Indeitsev, D. A.; Mozhgova, Nadezhda; Лукин, А. В.; Popov, I. A.

doi:10.3103/s0025654422601355

Cited by 4 publications

(1 citation statement)

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“…In a recent study, Morozov et al [33] explored the effects of initial curvature amplitude and shape on static equilibrium positions under electrostatic and thermal influences, utilizing a geometrically nonlinear model of a Bernoulli-Euler beam. Additionally, the same research group [34] employed numerical methods and bifurcation-based theory, considering both symmetric and asymmetric lower modes of free vibrations, to investigate the potential use of these structures as sensitive elements in high-precision mode-localized resonant microaccelerometers.…”

Section: Introductionmentioning

confidence: 99%

Modeling and Structural Analysis of MEMS Shallow Arch Assuming Multimodal Initial Curvature Profiles

Alneamy,

Ouakad

2024

Mathematics

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The present investigation focuses on the design and mathematical modeling of a microelectromechanical (MEMS) mode-localized based sensor/actuator system. This device incorporates a sensitive clamped–clamped shallow arch microbeam with an initial curvature shaped to resemble one of the first two symmetric and asymmetric modes of free oscillations of a clamped–clamped beam. The analysis reveals that with a suitable arrangement of the initial shape of the device flexible electrode and a proper tuning of the maximum initial rise and the actuating dc load enables the transition to display certain bistable behavior. This could be a better choice to build a device with a large stroke. Furthermore, the generated data showed the occurrence of mode-veering, indicating a coupling between the concerned symmetric and asymmetric modes of vibrations, and offering the possibility for such a device to be used as a mode-localized MEMS-based sensor utilizing veering and crossing phenomena. Indeed, where a certain energy is exchanged between symmetric and asymmetric modes of a microbeam, it can be utilized to serve as a foundation for the development of a new class of highly precise resonant sensors that can capture, with a certain level of precision, any of the sensed signal amplitudes.

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Section: Introductionmentioning

confidence: 99%