Modeling and analysis of MEMS disk resonators

Chorsi, Meysam T.; Chorsi, Hamid T.

doi:10.1007/s00542-017-3645-9

Cited by 19 publications

(13 citation statements)

References 49 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Readers can refer to the following papers for in depth theoretical analysis and device simulations in MEMS and optics [4][5][6][7][8][9][10][11][12][13][14].…”

Section: Numerical Examplesmentioning

confidence: 99%

Analysis of Composite Dielectric Metamaterials Using Integral Equation Techniques

Stevenson¹

2020

Preprint

View full text Add to dashboard Cite

We study numerically the electromagnetic scattering properties of three dimensional (3D),arbitrary shaped composite dielectric metamaterials. Using integral equation techniques, we firstderive a surface integral equation formulation which produces well-conditioned matrix equation.To solve the obtained integral equations, we apply a Galerkin scheme and choose the basis andtesting functions as Rao-Wilton-Glisson defined on planar patches. We then develop an algorithmto speed up the matrix-vector multiplications by employing the well-known method of moments(MoM) and the multilevel fast multipole algorithm on personal computer (PC) clusters. Some 3Dnumerical examples are presented to demonstrate the validity and accuracy of the proposedapproach.

show abstract

“…Readers can refer to the following papers for in depth theoretical analysis and device simulations in MEMS and optics [4][5][6][7][8][9][10][11][12][13][14].…”

Section: Numerical Examplesmentioning

confidence: 99%

Analysis of Composite Dielectric Metamaterials Using Integral Equation Techniques

Stevenson¹

2020

Preprint

View full text Add to dashboard Cite

show abstract

“…Aside from phase noise predicted in LTV model, the main addition term is caused by nonlinear effects in MEMS resonator [ 34 , 35 ]. Nonlinear models of MEMS disk resonators have been exclusively investigated [ 36 , 37 , 38 ]. Chorsi et al [ 36 , 37 ] modeled MEMS disk resonators, including the influences of intermolecular forces such as van der Waals and Casimir, and found the intermolecular forces may cause additional capacitive nonlinearity.…”

Section: Introductionmentioning

confidence: 99%

“…Nonlinear models of MEMS disk resonators have been exclusively investigated [ 36 , 37 , 38 ]. Chorsi et al [ 36 , 37 ] modeled MEMS disk resonators, including the influences of intermolecular forces such as van der Waals and Casimir, and found the intermolecular forces may cause additional capacitive nonlinearity. Li et al [ 38 ] also found that in MEMS DRG the main nonlinearity is caused by electrostatic and capacitive nonlinearities and proposed a method to reduce them.…”

Section: Introductionmentioning

confidence: 99%

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Zhang

Chen

Yin

et al. 2020

Sensors

View full text Add to dashboard Cite

In this paper, a detailed analysis of the influence of phase noise on the micro-electro-mechanical system (MEMS) disk resonator gyroscope (DRG) is presented. Firstly, a new time-varying phase noise model for the gyroscope is established, which explains how the drive loop circuit noise converts into phase noise. Different from previous works, the time-varying phase noise model in this paper is established in mechanical domain, which gain more physical insight into the origin of the phase noise in gyroscope. Furthermore, the impact of phase noise on DRG is derived, which shows how the phase noise affects angular velocity measurement. The analysis shows that, in MEMS DRG, the phase noise, together with other non-ideal factors such as direct excitation of secondary resonator, may cause a low frequency noise in the output of the gyroscope system and affect the bias stability of the gyroscope. Finally, numerical simulations and experiment tests are designed to prove the theories above.

show abstract

“…The micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) is a typical wine-glass mode gyroscope and it has become more favorable for high performance MEMS gyroscopes [ 1 , 2 , 3 , 4 ]. A lot of progress has been made on the disk resonator and DRG, including Q factor optimization [ 5 , 6 , 7 , 8 ], frequency tuning [ 9 , 10 , 11 ], resonator noise analysis and structure optimization [ 12 , 13 , 14 , 15 ], microcosmic dynamics analysis [ 16 , 17 ], nonlinear models of disk resonators [ 18 , 19 ], and fabrication processes [ 20 , 21 ].…”

Section: Introductionmentioning

confidence: 99%

First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

Wang

Xie

2020

Sensors

View full text Add to dashboard Cite

In this paper, a first-order closed-loop mechatronics model of a micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) with a configurable ASIC is established for closed-loop design and performance analysis. There are usually some nonlinear modules in the gyroscope mechatronics model, and it is difficult to design the closed-loop controllers using classical automatic control theory. An order-reduction method (ORM) based on the Laplace transform and inverse Laplace transform is proposed to linearize the nonlinear modules. The linearized model is proved to show good agreement with the original mechatronics model in terms of system response. The experimental verification was conducted to demonstrate the validation of this method.

show abstract

Modeling and analysis of MEMS disk resonators

Cited by 19 publications

References 49 publications

Analysis of Composite Dielectric Metamaterials Using Integral Equation Techniques

Analysis of Composite Dielectric Metamaterials Using Integral Equation Techniques

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope

Contact Info

Product

Resources

About