Modeling and analysis of sub-aperture tool influence functions for polishing curved surfaces

Wan, Songlin; Zhang, Xiangchao; Zhang, Hao; Xu, Min; Jiang, Xiangqian

doi:10.1016/j.precisioneng.2017.09.013

Cited by 37 publications

(6 citation statements)

References 10 publications

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“…Through several simulation experiments, it was found that when the extension distance is specified as 1.5R ti f , the influence of the edge-up phenomenon on the region of interest can be effectively avoided and a better removal effect obtained. In this algorithm, we first determine the range of path spacing changes according to Equation (7) and give the corresponding path optimization model specified by Equations (5) or (6). Then, the initial planned Archimedes spiral path can be given by Equation 8as follows: (8) where γ 0 represents the starting spiral radius; p 0 represents the pitch of the Archimedean spiral path; ∆θ represents the angular coordinate increment of adjacent path points in the initial planned path; R max represents the limit of the radius of the circular area of the initial planned Archimedes spiral path; INT represents the operation of rounding down.…”

Section: Variable Pitch Spiral Path Planning Methodsmentioning

confidence: 99%

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Theoretical Study of Path Adaptability Based on Surface Form Error Distribution in Fluid Jet Polishing

et al. 2018

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In the technology of computer-controlled optical surfacing (CCOS), the convergence of surface form error has a close relationship with the distribution of surface form error, the calculation of dwell time, tool influence function (TIF) and path planning. The distribution of surface form error directly reflects the difference in bulk material removal depth across a to-be-polished surface in subsequent corrective polishing. In this paper, the effect of path spacing and bulk material removal depth on the residual error have been deeply investigated based on basic simulation experiments excluding the interference factors in the actual polishing process. With the relationship among the critical evaluation parameters of the residual error (root-mean-square (RMS) and peak-to-valley (PV)), the path spacing and bulk material removal depth are mathematically characterized by the proposed RMS and PV maps, respectively. Moreover, a variable pitch path self-planning strategy based on the distribution of surface form error is proposed to optimize the residual error distribution. In the proposed strategy, the influence of different bulk material removal depths caused by the distribution of surface form error on residual error is compensated by fine adjustment of the path spacing according to the obtained path spacing optimization models. The simulated experimental results demonstrate that the residual error optimization strategy proposed in this paper can significantly optimize the overall residual error distribution without compromising the convergence speed. The optimized residual error distribution obtained in sub-regions of the polished surface is more uniform than that without optimization and is almost unaffected by the distribution of parent surface form error.

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Section: Variable Pitch Spiral Path Planning Methodsmentioning

confidence: 99%

“…Computer-controlled optical surfacing technology (CCOS), first proposed by Itek. Inc. in 1970, has been widely used and developed in optical surfacing with high form accuracy [4,5].…”

Section: Introductionmentioning

confidence: 99%

Theoretical Study of Path Adaptability Based on Surface Form Error Distribution in Fluid Jet Polishing

et al. 2018

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“…Based on the bonnet lifting method, the edge influence function was established by Li to suppress the nodding function brought by the change of contact pressure when compressing the edge and enhance the quality of surface processing [18]. Wan created the TIF model by considering the various matching states of the figuring pad and the small tool, which caused the influence of the different sizes and shapes of the figuring spot on the TIF [19]. Based on the Preston equation and the Hertzian contact theory, Ren developed a removal function model and analyzed the influence of the pressure distribution in the figuring area on TIF [20].…”

Section: Introductionmentioning

confidence: 99%

Mechanism of a deterministic sponge figuring processing (SFP) in Ni–P surface formation considering the robustness of the tool influence function: modeling and experimental investigation

Li,

Xue

et al. 2024

Int J Adv Manuf Technol

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Deterministic small-tool polishing is paramount to fabricating ultra-precise aspheric X-ray optical components with the precise dwell time algorithm employed to remove the surface material in this procedure. However, the sub-aperture polishing removal function introduces surface ripple characteristics and degrades optical performance due to its narrower full width at half maximum, reducing the volume removal rate and inducing the surface high-spatial frequency and mid-spatial frequency error. It is urgent to insert flexibility control into deterministic small-tool polishing to enhance the adaptive capacity of tools to curvature variations and to obtain stable Gaussian-like tool influence functions. This paper explored the surface finishing removal mechanism based on a compliant figuring process, which verified the robustness and removal efficiency of the tool influence function for the planar and various curvatures of the Ni-P surface. Initially, a flexible head with in-situ correction of high slurry absorption and retention capacity on a self-developed six-axis ultra-precision figuring machine was selected as the figuring tool. Based on the compliant figuring process removal mechanism with three removal regimes, the relative velocity and contact pressure model were established. Meanwhile, an orthogonal experiment utilizing the compliant tool to figuring the planar specimen surface was carried out on the figuring testing machine, analyzing the impact of the removal function on the surface roughness and the form accuracy, and a pre-experiment was conducted to confirm the validity of the model. Furthermore, the orthogonal analysis of the variance approach was implemented to analyze the weight of the influencing factors of the compliant figuring process and to obtain the optimal process parameters for a stable Gaussian-like distribution removal function. As a result, the material removal kernel was sensitive to the offset accounting for 40%, and the error was 8% in the predicted value of the volume removal rate under the optimal parameter conditions. The magnitude trend of the mid-frequency error was suppressed, and the frequency error was converted to facilitate the subsequent processing in the curve of 1-power spectral density. Finally, the stability of figuring variable curvature large optics was delved into, the effect on the form accuracy and the optical performance with the variation of the residence time distribution, including the matching relationship between the full-width at the half of the maximum and spatial wavelength. From the perspective of optical performance, the mid-frequency ripple of the optics element is effectively enhanced from 2.4nm PV to 1.8nm PV following the second iteration and the half-power diameter of the multilayer film optics is promoted from 54.26 arcsec to 41.77 arcsec via the star-point approach and the visible light observation approach.

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“…The key to deterministic CCOS polishing relies on the feedback of the form error of the workpiece. By controlling the residence time and polishing parameters, the figure of the surface can be refined accordingly [2].…”

Section: Introductionmentioning

confidence: 99%

In-Situ Inspection for Robotic Polishing of Complex Optics

Zhang

Wang

Chen

et al. 2022

Int. J. Robot. Autom. Technol.

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With rapid development of modern optical manufacturing technologies, industrial robot polishing has a wide range of application scenarios and broad development potential in the field of optical manufacturing. The integration of in-situ inspection is a key to improving the reliability and efficiency of precision manufacturing. Deflectometry is a promising in-situ measuring method due to its large dynamic range and structural flexibility. The measurement principles, calibration methods, phase retrieval, surface reconstruction, scope extension etc are presented systematically. The key problems of height-slope ambiguity and position-angle uncertainty are analyzed in details. High-precision measurement of complex optical elements is realized, which is of great significance to the intelligent manufacturing of key optical components.

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Modeling and analysis of sub-aperture tool influence functions for polishing curved surfaces

Cited by 37 publications

References 10 publications

Theoretical Study of Path Adaptability Based on Surface Form Error Distribution in Fluid Jet Polishing

Theoretical Study of Path Adaptability Based on Surface Form Error Distribution in Fluid Jet Polishing

Mechanism of a deterministic sponge figuring processing (SFP) in Ni–P surface formation considering the robustness of the tool influence function: modeling and experimental investigation

In-Situ Inspection for Robotic Polishing of Complex Optics

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