Modeling and analyzing of an H-drive precision XY stage

Zhao, Ye; Yang, Kaiming; Zhu, Yu; Shangfeng, Pan

doi:10.1109/mace.2010.5535773

Cited by 7 publications

(5 citation statements)

References 1 publication

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“…The dynamics of the X-axis servomechanism is represented by a second-order linear differential equation as follow (4) where x is the displacement of X-axis table, Exponential friction model is adopted, and it can be expressed as…”

Section: Dynamic Modeling and Analysismentioning

confidence: 99%

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Dynamic analysis of an XY positioning table

Wang

Liang

et al. 2013

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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The dynamic modeling and analysis of a novel XY positioning table are presented in this paper. The XY table is directly driven by two linear voice coil motors (LVCMs), and Xand Y-axes motion decoupling is realized by using a novel flexible decoupling mechanism. Considering the characteristics of XY table, the dynamic model of X-and Y-axes servomechanisms are established through bond graph method, respectively, and then the state space equations are derived. The result of dynamic analysis can provide important information for the controller design.

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Section: Dynamic Modeling and Analysismentioning

confidence: 99%

“…Zhao et al [4] established a direct-drive table using Lagrangian equation. Cai et al [5] carried out the dynamic modeling of a 3-DOF ultra-precision positioning table with air bearing through rigid body finite rotation Jourdain Principle.…”

Section: Introductionmentioning

confidence: 99%

Dynamic analysis of an XY positioning table

Wang

Liang

et al. 2013

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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“…However, with the demand of the production process for long strokes, large driving force, and high load capacity, the uniaxial drive XY platform is limited. In literature, 1 Biaxial drive refers to the movement in a certain direction is driven by two motors, which has the advantages of the large driving force, strong load capacity, and large stroke, but also brings low synchronous control accuracy. In literature, 2 in order to improve the servo performance of the multi-axis linkage system, measures need to be taken in two aspects.…”

Section: Introductionmentioning

confidence: 99%

An active disturbance rejection synchronous control strategy based on cross compensation for stepper motor XY platform

Chen

Xue

Song

et al. 2022

Measurement and Control

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In view of the system uncertainty factors and bilateral drive synchronization problems of XY platform driven by stepping motor, on the basis of the mathematical model of single axis servo system, in order to improve traceability and disturbance rejection in X,Y direction, a double loop structure with PID controller as speed loop and active disturbance rejection as position loop is proposed to solve the contradiction between rapidity and overshoot, moreover, an ESO performance analysis method is proposed, and the parameter tuning rules of ADRC is summarized. On this basis, a deviation self-coupling compensation control strategy is proposed to solve the problem of bilateral drive synchronization in axis X direction, and the mechanism and parameter adjusting method of the compensator are studied. The comparative experiment between ADRC+PID+deviation self-coupling compensation and PID+PID+deviation self-coupling compensation, the comparative experiment between ADRC+PID+deviation self-coupling compensation and ADRC+PID are conducted, respectively. Finally, the experiment of synthetic trajectory of X and Y is carried out, the simulation and experimental results demonstrate that the response time of the control strategy proposed in this paper is 0.5 s, which is 0.2 s faster than PID’s, and the disturbance recovery time is 50% of PID control. Therefore, the proposed ADRC+PID+deviation self-coupling compensation control strategy can not only effectively improve the tracking performance of the XY platform system, but also enhance the robustness of the system.

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“…Dynamic model is the basic of dynamic analysis and controller design, so many researchers have been working on the dynamic modeling and analysis of XY stages. Teo et al (2007) and Zhao et al (2010) established the dynamic models of the mechanical system of an H-type gantry direct-drive stages using Lagrangian equation. Cai et al (2011) carried out the dynamic modeling of a 3-DOF ultra-precision positioning stage with air bearing through rigid body finite rotation Jourdain Principle and the vibration frequency and mode were analysed and discussed.…”

Section: Introductionmentioning

confidence: 99%

Dynamic modeling and control of a novel XY positioning stage for semiconductor packaging

Wang

Gao

et al. 2014

Transactions of the Institute of Measurement and Control

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Modeling and analyzing of an H-drive precision XY stage

Cited by 7 publications

References 1 publication

Dynamic analysis of an XY positioning table

Dynamic analysis of an XY positioning table

An active disturbance rejection synchronous control strategy based on cross compensation for stepper motor XY platform

Dynamic modeling and control of a novel XY positioning stage for semiconductor packaging

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