Abstract:The performance of micromirrors in terms of their maximum deflection is often limited due to mechanical constraints in the design. To increase the range of achievable deflection angles, we present a novel concept in which a free-lying sphere with a flat side as reflector can be rotated. Due to the large forces needed to move the sphere, multiple electrostatic actuators are used to cooperatively rotate the sphere in iterative steps by impacts and friction. A parameterized system-level model of the configuration… Show more
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