2014
DOI: 10.1051/matecconf/20141604003
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Modeling and non-linear responses of MEMS capacitive accelerometer

Abstract: Abstract.A theoretical investigation of an electrically actuated beam has been illustrated when the electrostatic-ally actuated micro-cantilever beam is separated from the electrode by a moderately large gap for two distinct types of geometric configurations of MEMS accelerometer. Higher order nonlinear terms have been taken into account for studying the pull in voltage analysis. A nonlinear model of gas film squeezing damping, another source of nonlinearity in MEMS devices is included in obtaining the dynamic… Show more

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Cited by 1 publication
(2 citation statements)
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“…Hence, one may go for approximate solution by using the perturbation method. Here, method of multiple scales as explained in [25,[29][30][31][32][33] is used to obtain the set of algebraic equations turning into non-autonomous equations of motion for three resonance conditions, viz. primary resonance, parametric resonance condition, and third-order sub-harmonic conditions are being expressed under steady state conditions.…”
Section: Bifurcation and Stabilitymentioning
confidence: 99%
See 1 more Smart Citation
“…Hence, one may go for approximate solution by using the perturbation method. Here, method of multiple scales as explained in [25,[29][30][31][32][33] is used to obtain the set of algebraic equations turning into non-autonomous equations of motion for three resonance conditions, viz. primary resonance, parametric resonance condition, and third-order sub-harmonic conditions are being expressed under steady state conditions.…”
Section: Bifurcation and Stabilitymentioning
confidence: 99%
“…primary resonance, parametric resonance condition, and third-order sub-harmonic conditions are being expressed under steady state conditions. The procedures used to derive the reduced order equation are similar to those explained in [25,[29][30][31][32][33]. Based on numerical values of the coefficients of the damping, forcing, and non-linear terms, they are one order less than the coefficients of the linear terms, which have a value of unity in this case and as result, in the following technique, co-efficient are expressed as and K ¼ εK for sake of simplicity.…”
Section: Bifurcation and Stabilitymentioning
confidence: 99%