Modeling and simulation of the MEMS vibratory gyroscope

Patel, Chandradip; McCluskey, Patrick

doi:10.1109/itherm.2012.6231524

Cited by 13 publications

(6 citation statements)

References 7 publications

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“…To increase performance, displacement of the proof mass along the drive axis should be perfect (minimum error between reference vibration and drive axis displacement). However, the presence of unavoidable errors in the manufacturing process, and the influence of the outside ambient temperature, result in the mechanical coupling between the two axes, mechanical–thermal noises, and environmental condition-dependent parameter variations [ 6 , 7 , 18 , 19 ]. All these adversary effects degrade the performance of the MEMS gyroscope, so that a closed-loop control system is essential for improving the performance of the MEMS gyroscope through effectively compensating for the mechanical imperfections and the disturbances.…”

Section: Coriolis Vibratory Mems Gyro Basicsmentioning

confidence: 99%

Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller

Öztürk

Erkmen

2022

Micromachines

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MEMS (micro electrical mechanical systems) gyroscopes are used to measure the angular rate in several applications. The performance of a MEMS gyroscope is dependent on more than one factor, such as mechanical imperfections, environmental condition-dependent parameter variations, and mechanical–thermal noises. These factors should be compensated to improve the performance of the MEMS gyroscope. To overcome this compensation problem, a closed-loop control system is one of the solutions. In this paper, a closed-loop control system is implemented. However, other than previously applied methods, a proxy-based sliding mode control approach is proposed, which is a novelty for the control of the MEMS gyroscope drive axis since, to the best of our knowledge, this method has not been applied to gyroscope control problems. Proxy-based sliding mode controllers do not suffer from the chattering phenomenon. Additionally, we do not need an exact system model to implement the control law. In particular, we are investigating, in this paper, the compatibility and performance of a proxy-based sliding mode controller for a closed-loop gyroscope implementation. We show that our proposed method provides robustness against model uncertainties and disturbances and is easy to implement. We also compare the performance of classical sliding mode controllers and proxy-based sliding mode controllers, which demonstrate the evident superiority of the proxy-based controller in our implementation results. Simulation results show that system error and gyroscope total error reduced by 49.52% and 12.03%, respectively, compared to the sliding mode controller. Simulation results are supported with the experimental data, and experimental results clearly demonstrate the superiority of the proxy-based sliding mode controller.

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Section: Coriolis Vibratory Mems Gyro Basicsmentioning

confidence: 99%

Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller

Öztürk

Erkmen

2022

Micromachines

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“…Achieving high performance of MEMS gyroscopes is challenging due to various factors that influence the sensor's reliability, stability, and accuracy. These factors include fabrication tolerances, temperature effects, humidity effects, mechanical vibrations, and shock [7,8]. Fabrication tolerances can cause variations in the fabricated device from the designed device, leading to asymmetry, mismatch, and misalignment of the gyroscope structure and electrodes.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability

Bashir,

Bazaz,

Saleem

et al. 2024

Meas. Sci. Technol.

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This paper presents an efﬁcient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP's Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes is presented to minimize cross-axis coupling and optimize the gyroscope's performance. The device features a size of 1.8 ×2.772 mm^2. A decoupled mass MEMS gyroscope has been designed using a novel mechanical beam configuration that optimizes the structural design to reduce unwanted interactions between drive and sense axes motions. Mode order has been achieved by obtaining the first two modes as drive and sense modes at 9946.3 Hz and 10202.7 Hz, respectively. Parallel plate electrostatic tuning electrodes have been added to adjust and match the drive and sense modes at the resonant frequencies of 9946 Hz. This mode matching is crucial for optimizing gyroscope performance, accuracy, and sensitivity. The effects of temperature variation on the performance of the designed decoupled mass MEMS gyroscope have been investigated, particularly in terms of its mode-matched operation achieved using tuning electrodes. Finite Element Method (FEM) simulations were conducted, demonstrating that thermal stability was achieved, and mode-matched operation was maintained within the temperature range of -40 ºC to 80 ºC. The gyroscope exhibits enhanced performance compared to existing MEMS gyroscopes under mode-matched conditions, featuring a lower temperature coefficient of frequency (TCF) at 0.0415 Hz/ºC in the drive mode and 0.0165 Hz/ºC in the sense mode. FEM analysis for the fabrication process tolerances has been done, where MEMS gyroscope’s resonant frequencies, output capacitance, output displacement, and sense mode quality factor have shown negligible changes to fabrication process tolerances. Transient analysis was conducted using CoventorWare MEMS+ 3D schematic, which was integrated with MATLAB Simulink to measure the MEMS gyroscope’s output response, which corresponded with the varying input angular velocity signal.

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“…In recent years, due to a rapid development of microelectromechanical systems (MEMS) technology, MEMS gyroscopes have become an indispensable portion of the inertial navigation, military, and consumer electronics market for the advantages of their small size, light weight, low cost, and high reliability [ 1 ]. The MEMS gyroscope is a device for angular rate detection, and its basic principle is based on the Coriolis Effect [ 1 ]. The proof mass of a gyroscope oscillates along the drive axis with a stable frequency and stationary amplitude; meanwhile, this gyroscope is subjected to an angular rate Ω in the input axis.…”

Section: Introductionmentioning

confidence: 99%

PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

Tong

Liu

et al. 2018

Sensors

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With an aim to reduce the cost of prototype development, this paper establishes a PSPICE hybrid model for the simulation of capacitive microelectromechanical systems (MEMS) gyroscopes. This is achieved by modeling gyroscopes in different modules, then connecting them in accordance with the corresponding principle diagram. Systematic simulations of this model are implemented along with a consideration of details of MEMS gyroscopes, including a capacitance model without approximation, mechanical thermal noise, and the effect of ambient temperature. The temperature compensation scheme and optimization of interface circuits are achieved based on the hybrid closed-loop simulation of MEMS gyroscopes. The simulation results show that the final output voltage is proportional to the angular rate input, which verifies the validity of this model.

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Modeling and simulation of the MEMS vibratory gyroscope

Cited by 13 publications

References 7 publications

Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller

Coriolis Vibratory MEMS Gyro Drive Axis Control with Proxy-Based Sliding Mode Controller

Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability

PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

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