Modeling and simulation of the deformation process of PTFE flexible stamps for nanoimprint lithography on curved surfaces

Sonne, Mads Rostgaard; Smistrup, Kristian; Hannibal, Morten; Thorborg, Jesper; Nørregaard, Jesper; Hattel, Jesper Henri

doi:10.1016/j.jmatprotec.2014.10.011

Cited by 16 publications

(15 citation statements)

References 11 publications

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“…Numerical simulation methods could be further divided into macroscopic and microscopic simulations according to the different dimension scales of the research objects. The finite element method (FEM) is the primary method for macroscopic [137][138][139][140] simulation.…”

Section: Macroscopic and Microscopic Simulations Of Hot Embossingmentioning

confidence: 99%

Development and Application of Hot Embossing in Polymer Processing: A Review

Sun¹,

Zhuang²,

Liu³

et al. 2019

ES Mater.Manuf.

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Hot embossing of polymer materials is a promising technology for the fabrication of high quality and precision patterns on the micro/nanoscales. There are three basic forms of hot embossing including, plate-to-plate (P2P), roll-to-plate (R2P), and roll-to-roll (R2R) hot embossing. It also can be divided into isothermal and non-isothermal hot embossing according to the different temperature control modes of polymer substrates and structured molds. This review reports recent progress made of hot embossing methods in polymer processing and the efforts to shorten its processing period for commercial applications. Research and innovations in simulation of hot embossing process and mold fabrication are also comprehensively summarized. Within this review, microfluidics, light guide plate (LGP), and other novel applications of hot embossing are systematically cataloged. Finally, challenges and future trends of hot embossing in polymer processing are presented and forecasted.

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Section: Macroscopic and Microscopic Simulations Of Hot Embossingmentioning

confidence: 99%

Development and Application of Hot Embossing in Polymer Processing: A Review

Sun¹,

Zhuang²,

Liu³

et al. 2019

ES Mater.Manuf.

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“…The anticipated pattern transfer method from a silicon wafer to final injection moulded plastic product is visualized in Figure 10 (this technology has been tested at pilot scale and implemented industrially For NIL on injection moulding tool inserts (and on double curved surfaces in general), the deformation and stretch of the flexible stamp can be up to 50% and in the millimetre range. 139 This is problematic since even very small changes in the nanostructures geometry will change the wanted overall functionality. 140 The deformations are therefore important to take into account, when the planar silicon masters are designed.…”

Section: -63mentioning

confidence: 99%

“…A flexible nanoimprint solution for nanostructuring an injection moulding tool insert. 130 increment size. It is assumed that J 2 flow theory applies during the viscoplastic deformation of the PTFE material.…”

Section: -63mentioning

confidence: 99%

“…This clearly indicates the necessity for numerical models in order to take this deformation into account when the nanostructures are designed in the first step of the process. The developed models have shown to predict the stretch of the nanostructures with a maximum error of 0.5% defined as the difference between measured and simulated wave lengths of the nanostructures on the surface of the deformed flexible stamp, 130 indicating their ability to capture the essential physics of this manufacturing process. as wind turbine blades where low weight and high strength are crucial.…”

Section: -63mentioning

confidence: 99%

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Multiphysics modelling of manufacturing processes: A review

Jabbari

Baran

Mohanty³

et al. 2018

Advances in Mechanical Engineering

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Numerical modelling is increasingly supporting the analysis and optimization of manufacturing processes in the production industry. Even if being mostly applied to multistep processes, single process steps may be so complex by nature that the needed models to describe them must include multiphysics. On the other hand, processes which inherently may seem multiphysical by nature might sometimes be modelled by considerably simpler models if the problem at hand can be somehow adequately simplified. In the present article, examples of this will be presented. The cases are chosen with the aim of showing the diversity in the field of modelling of manufacturing processes as regards process, materials, generic disciplines as well as length scales: (1) modelling of tape casting for thin ceramic layers, (2) modelling the flow of polymers in extrusion, (3) modelling the deformation process of flexible stamps for nanoimprint lithography, (4) modelling manufacturing of composite parts and (5) modelling the selective laser melting process. For all five examples, the emphasis is on modelling results as well as describing the models in brief mathematical details. Alongside with relevant references to the original work, proper comparison with experiments is given in some examples for model validation.

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“…Within the field of nanoimprint lithography, there is however a lack of modelling and simulating the deformation process of the flexible stamp on curved surfaces. Recently, Sonne and Hattel [13] presented a model for the constitutive and frictional behaviour of PTFE flexible stamps for nanoimprint lithography, and later its application to nanostructures creating a colour effect [14]. A nickel foil is often used as the imprinting flexible stamp.…”

Section: Introductionmentioning

confidence: 99%

Modelling the deformation of nickel foil during manufacturing of nanostructures on injection moulding tool inserts

Sonne¹,

Čech

Pranov³

et al. 2016

AIP Conference Proceedings

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In the present work, a manufacturing process for transferring nanostructures from a glass wafer, to a double-curved insert for injection moulding is demonstrated. A nanostructure consisting of sinusoidal cross-gratings with a period of 426 nm is successfully transferred to hemispheres on an aluminium substrate with three different radii; 500 μm, 1000 μm and 2000 μm, respectively. The nanoimprint is performed using a 50 μm thick nickel foil, manufactured using electroforming. During the imprinting process, the nickel foil is stretched due to the curved surface of the aluminium substrate. Experimentally, it is possible to address this stretch by counting the periods of the cross-gratings via SEM characterization. A model for the deformation of the nickel foil during nanoimprint is developed, utilizing non-linear material and geometrical behaviour. Good agreement between measured and numerically calculated stretch ratios on the surface of the deformed nickel foil is found, and it is shown, that from the model it is also possible to predict the geometrical extend of the nanostructured area on the curved surfaces.

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Modeling and simulation of the deformation process of PTFE flexible stamps for nanoimprint lithography on curved surfaces

Cited by 16 publications

References 11 publications

Development and Application of Hot Embossing in Polymer Processing: A Review

Development and Application of Hot Embossing in Polymer Processing: A Review

Multiphysics modelling of manufacturing processes: A review

Modelling the deformation of nickel foil during manufacturing of nanostructures on injection moulding tool inserts

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