Modeling complex processability constraints in high-mix semiconductor manufacturing

Abstract

In semiconductor high-mix fabs, several technology nodes are run on the same line, using tool types from different generations. In this context, processability is a function defining which products can be processed on a given machine considering the current status of both the product and the machine. So in a high-mix context, having an information system that provides reliable information on processability and that can support the evolution of processability rules is fundamental. In this paper, we analyze the key elements for such a system. Based on the example of the implementation of fab constraints at STMicroelectronics' Crolles300 production unit, we illustrate the consequences of the integration of new processability rules and propose flexible and agile UML class diagrams enabling information system to meet evolution requirements. The approach is validated on real fab data, and its impact is discussed.

Methodology for Aligning Factory Information and Control Systems in a Complex and Dynamic Environment: Case of Semiconductor Manufacturing

“…• For IT: Supporting discussions and helping decisions between business stakeholders and IT experts when a trade-off has to be made for the evolution of FICS, and pooling the IT development resources. The proposed approach has been initiated at the 300mm production unit of STMicroelectronics in Crolles for processability (Ben Amira et al, 2013). The first step was to capture user requirements and then to define use cases as well as the corresponding functional concept.…”

“…With time, this will blur business needs and severely lower the overall performance of the organization. The example of processability developed in (Ben Amira et al, 2013) highlights the difficulty to properly identify existing constraints and to adapt FICS to take new items into account. Processability is a function which is specific to semiconductor manufacturing and does not exist in most other industries where only the maintenance status of tools is considered; see (Ben Amira et al, 2013) for more details.…”

“…The example of processability developed in (Ben Amira et al, 2013) highlights the difficulty to properly identify existing constraints and to adapt FICS to take new items into account. Processability is a function which is specific to semiconductor manufacturing and does not exist in most other industries where only the maintenance status of tools is considered; see (Ben Amira et al, 2013) for more details. The challenge to face in the 300mm unit of STMicroelectronics in Crolles is to be able to support the deployment of new technology nodes by permanently aligning FICS on ever evolving requirements or, in other words, to manage a rate of requirements which is greater than the time needed to deliver FICS solutions.…”