2014 29th International Conference on Microelectronics Proceedings - MIEL 2014 2014
DOI: 10.1109/miel.2014.6842090
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Modeling of 2DEG and 2DHG in i-GaN capped AlGaN/AlN/GaN HEMTs

Abstract: A 2D drift-diffusion model with Schrödinger-Poisson quantum corrections using ATLAS toolbox by Silvaco is calibrated against experimental I D -V GS characteristics of the 1 μm gate length GaN-based high electron mobility transistor (HEMT). The model takes into account both piezoelectric and spontaneous polarization effects at the all interfaces of GaN/Al 0.25 Ga 0.75 N/AlN/GaN structure. This unintentionally doped hetero-structure transistor has i) an enhanced carrier mobility due to the decrease in alloy-diso… Show more

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Cited by 9 publications
(4 citation statements)
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“…Figure 1a,b shows the schematic cross-sectional diagram of the designed conventional HEMTs with an Al 0.1 Ga 0.9 N back barrier and a polarization-graded AlGaN back barrier. The epitaxial structure of an Al 0.1 Ga 0.9 N back-barrier HEMT was composed of a 2 µm unintentionally n-type doped GaN buffer layer, with a background carrier concentration of 1 × 10 16 cm −3 [30], a 1 nm AlN space layer, a 10 nm undoped In 0.17 Al 0.83 N barrier layer, a 14-nm-thick GaN channel and a 25 nm undoped Al 0.1 Ga 0.9 N back-barrier layer. Compared with the conventional back-barrier structure, the optimized structure introduced a 25 nm graded AlGaN back barrier with Al content linearly changing from 0% (bottom) to 10% (top) along the epitaxial growth.…”
Section: Device Description and Physical Modelsmentioning
confidence: 99%
“…Figure 1a,b shows the schematic cross-sectional diagram of the designed conventional HEMTs with an Al 0.1 Ga 0.9 N back barrier and a polarization-graded AlGaN back barrier. The epitaxial structure of an Al 0.1 Ga 0.9 N back-barrier HEMT was composed of a 2 µm unintentionally n-type doped GaN buffer layer, with a background carrier concentration of 1 × 10 16 cm −3 [30], a 1 nm AlN space layer, a 10 nm undoped In 0.17 Al 0.83 N barrier layer, a 14-nm-thick GaN channel and a 25 nm undoped Al 0.1 Ga 0.9 N back-barrier layer. Compared with the conventional back-barrier structure, the optimized structure introduced a 25 nm graded AlGaN back barrier with Al content linearly changing from 0% (bottom) to 10% (top) along the epitaxial growth.…”
Section: Device Description and Physical Modelsmentioning
confidence: 99%
“…As miniaturisation and increased power density are acknowledged evolutionary paths in the world of power electronics, gallium nitride (GaN) transistor technologies emerge as a leading contender [17][18] [19]. However, GaN transistors' functioning is susceptible to various unwanted effects resulted from their intricate structure [20]. Among these effects are signal reflections, which can trigger false ON/OFF regimes and cause the gate to unbalance [21] whereas radiating a large amount of radio frequency (RF) electromagnetic (EM) interferences (EMI) [22][23].…”
Section: Introductionmentioning
confidence: 99%
“…Gallium Nitride (GaN) lateral devices [1][2][3][4][5][6][7][8][9][10] have been proliferating the power electronics industry. For power conversion applications, GaN vertical devices with reduced chip area are preferred over lateral GaN HEMT devices since blocking voltage can be scaled independently of the chip area and high value threshold voltages can be achieved.…”
Section: Introductionmentioning
confidence: 99%