Modeling of a monosilane rf-discharge plasma

Abstract

A monosilane if-discharge plasma is investigated by numerical methods. The results of Monte Carlo calculations of the electron kinetics are compared with the results of calculations in the hydrodynamic approximation. It is shown that the hydrodynamic model works well over the entire range of parameters of a plasma-chemical reactor for the deposition of amorphous silicon films. Certain plasma parameters of importance from the standpoint of cooling, such as the dissociation frequency of monosilane and the energy and flux of ions onto the electrodes, are investigated as functions of the discharge power density and the pressure in the reactor in the hydrodynamic approximation.

Boltzmann equation and Monte Carlo analysis of the spatiotemporal electron relaxation in nonisothermal plasmas

“…It simply reflects the very good agreement found for the isotropic distribution f 0 (z, U, t) ( Fig. 5), because both quantities are averages of it according to relations (7) and (8). The particle flux density (9) and energy flux density (10) are related to the anisotropic distribution f 1 (z, U, t).…”

“…One of the approaches consists of the solution of the electron Boltzmann equation. So far, the treatment of this kinetic equation is widely restricted to timedependent, but spatially homogeneous plasmas [1][2][3][4][5][6] or to space-dependent, but stationary plasmas [7][8][9][10][11][12][13][14][15][16][17]. In recent years the spatiotemporal description of the kinetics of electrons in spatially one-dimensional plasmas [18][19][20] became possible, too.…”

First-principles particle simulation and Boltzmann equation analysis of negative differential conductivity and transient negative mobility effects in xenon

“…In [31] no calculations were performed for Kr and Xe, but it was stated that the TNM effect should take place in these gases, too. Such calculations for Xe were carried out in [28,32], where the reduced electric field was switched from a relatively high (1-5 Td) to a low (0.01 Td) value. It was shown that during the EEDF relaxation there exists a time interval where the electron mobility is negative.…”

Radio-frequency discharges in oxygen: I. Particle-based modelling

“…It can be, for instance, accompanied by a double layer (internal sheath [20]). Electro-negative gas discharges are thus rather complex and the investigation of the spatio-temporal structure of the discharge as a function of external control parameters (current, voltage, frequency, pressure, and geometry) is a great theoretical [21,22,23,24] and experimental [25,26,27,28,29,30] challenge. In addition, electro-negative processing gases are reactive molecular gases, with internal degrees of freedom, which lead to a quite involved plasma chemistry.…”