Modeling of argon discharge characteristics of planar-type surface wave plasmas in an electron fluid model

Self-consistent fluid modeling and simulation on a pulsed microwave atmospheric-pressure argon plasma jet

“…[33][34][35][36] The surface wave propagation and the plasma transport have been described by Henriques et al, 33 adopting a two-dimensional fluid model. Toba et al 34 have used a fluid model to investigate the production mechanism of a low-temperature surface-wave plasma. By using threedimensional fluid models, the space variations of the electron density and the electron temperature have been described by our previous reports.…”

“…In other words, the wave propagation and the plasma distribution are both simulated in the simulation. In view of self-consistent fluid simulation on microwave plasma sources, [34][35][36]42,43 the time scale of EM simulation approximates 8 ns (generally 15-25 microwave periods) and about 1 ls one balance state of plasma distributions reach, respectively. Therefore, a hybrid simulation model of 8 ns EM simulation plus 1 ls plasma fluid module will be constructed for present study.…”

“…34,36,43 For plasma fluid module, with two assumptions of an ambipolar diffusion (C e ¼ C i ) and an isotropic electron energy distribution function, 42 another group of equations can be derived as…”

Numerical Simulation Research in Plasma Technologies 3. Kinetic Computer Modeling of Microwave Surface-Wave Plasma Production

“…The EEDF is assumed known. There are different degrees of self-consistency: (a) simply solving for the fields while treating the plasma as an externally given medium [1,2,15,16,[24][25][26][27][28]; (b) assuming some phenomenological (usually linear) relation between the absorbed microwave power and the plasma density [29][30][31][32][33]; (c) solving the particle balance including a phenomenological local relation between the microwave field and the ionization rate [34][35][36][37]; or (d) adding a degree of non-locality by including the electron heat flow (diffusion of hot electrons from the regions, where they are heated, to the neighboring colder areas) [38]. These models are most suited for practical three-dimensional simulations, but need as their basis phenomenological constants derived either from experiments or from kinetic modeling.…”

Design of Large-Area Surface Wave Plasma Excited by Slotted Waveguide Antennas with Novel Power Divider

“…To overcome the problem associated with the appearance of the wave nature due to the wave propagation, some attempts have been made, e.g., the ICP antenna was modified to be shorter than the propagation wavelength 1,2) or the excitation frequency was decreased from 13.56 to 2 MHz with the ferrite module to increase power transfer efficiency. 14) Since SWP has many advantages for plasma material processing because of its superior characteristics such as high plasma density, low plasma potential, and low electron temperature, 26) many types of SWP source have been studied both theoretically [39][40][41][42][43][44] and experimentally. To produce SWP, a microwave at a frequency of 2.45 GHz is generally used; however, 915 MHz excitation was also investigated to achieve plasma enlargement with good uniformity since it might be advisable to employ an electromagnetic wave with a longer wavelength in the ultrahigh-frequency range.…”