No abstract

20nm-node planar MONOS cell which has improved reliability is developed. Extremely wide program/erase Vth window and good retention characteristics after cycling stress are obtained by buried charge cell structure. Moreover, Vth shift by interference between adjacent cells has smaller dependence on the cell-cell space than Vth window improvement when the half pitch is constant. These results show that the buried charge planar MONOS cell is suitable for Flash memory with 20nm-node and beyond.

We have developed a Co-Ni-Fe write head with a short yoke length for high-speed recording. By reducing the yoke length to 9 5 m, the eddy currents induced in a yoke with a relatively low resistivity (0 2 m) were reduced. The head of this short yoke had good write performance for a medium with a coercivity of 400 kA/m (5000 Oe) at frequencies up to 250 MHz (the overwrite less than 30 dB, and nonlinear transition shift less than 7%).Index Terms-Eddy currents, highmaterial, high-speed recording, short yoke length, write head.

SUMMARYA three-dimensional simulation code with the finite difference time domain (FDTD) method combined with the electron fluid model has been developed for the microwave excited surface wave plasma in the RDL-SWP device. This code permits the three-dimensional numerical analysis of the spatial distributions of electric field, power absorption, electron density, and electron temperature. At a low gas pressure (about 10 mTorr), the numerical results were compared with the experimental measurements that show the validity of this 3D simulation code. A simplified analysis assuming that the electron density is spatially uniform has also been studied and its applicability is evaluated by the comparison of the 3D simulation and the analytical solutions. The surface wave eigenmodes are determined by the electron density, and it is found that the structure of the device strongly influences the spatial distribution of the electric fields of surface waves in a low-density area (n e < 3.0 × 10 11 cm -3 ). A method to irradiate by microwave the whole surface area of the plasma is proposed. The method is found to be effective in obtaining a high uniformity distribution of electron density.

A three dimensional simulation code with the finite difference time domain (FDTD) method combined with the fluid model for electron has been developed for the microwave excited surface wave plasma in the RDL-SWP device. This code permits the numerical analysis of the spatial distributions of electric field, power absorption, electron density and electron temperature. At low gas pressure of about 10 mTorr, the numerical results were compared with the experimental measurements that show the validity of this 3-D simulation code. A simplified analysis assuming that an electron density is spatially uniform has been studied and its applicability is evaluated by the 3-D simulation. The surface wave eigenmodes are determined by the electron density, and it is found that the structure of the device strongly influences to the spatial distribution of the electric fields of surface waves in a low density area (ne<3.0☓10 11 cm-3). A method to irradiate a microwave to the whole surface area of the plasma is proposed which is found to be effective to obtain a high uniformity distribution of electron density.