Modeling of circular piezoelectric micro ultrasonic transducer using CuAl10Ni5Fe4 on ZnO film for sonar applications

Yaacob, Mohd Ikhwan Hadi; Arshad, Mohd Rizal; Manaf, Asrulnizam Abd

doi:10.1134/s1063771011010180

Cited by 13 publications

(5 citation statements)

References 15 publications

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“…The results showed that the unit-cell diaphragm achieved the maximum displacement when all the layers, from the top, top electrode, PZT active layer, bottom electrode, Ti passive layer, and cavity, had the same diameter. These results differed from those previously reported by Choi et al [47], Yaacob et al [48], and Sammoura et al [49] and were attributed to the use of flexible PI substrates.…”

Section: × 16 2d Arraycontrasting

confidence: 96%

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Kim

Liu

Jackson

et al. 2020

Sensors

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Piezoelectric micromachined ultrasound transducers (PMUT) incorporating lead zirconate titanate PbZr0.52Ti0.48O3 (PZT) thin films were investigated for miniaturized high-frequency ultrasound systems. A recently developed process to remove a PMUT from an underlying silicon (Si) substrate has enabled curved arrays to be readily formed. This research aimed to improve the design of flexible PMUT arrays using PZFlex, a finite element method software package. A 10 MHz PMUT 2D array working in 3-1 mode was designed. A circular unit-cell was structured from the top, with concentric layers of platinum (Pt)/PZT/Pt/titanium (Ti) on a polyimide (PI) substrate. Pulse-echo and spectral response analyses predicted a center frequency of 10 MHz and bandwidth of 87% under water load and air backing. A 2D array, consisting of the 256 (16 × 16) unit-cells, was created and characterized in terms of pulse-echo and spectral responses, surface displacement profiles, crosstalk, and beam profiles. The 2D array showed: decreased bandwidth due to protracted oscillation decay and guided wave effects; mechanical focal length at 2.9 mm; 3.7 mm depth of field for -6 dB; and -55.6 dB crosstalk. Finite element-based virtual prototyping identified figures of merit—center frequency, bandwidth, depth of field, and crosstalk—that could be optimized to design robust, flexible PMUT arrays.

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Section: × 16 2d Arraycontrasting

confidence: 96%

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

Kim

Liu

Jackson

et al. 2020

Sensors

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“…Common PMUT diaphragm shapes include round, square, rectangular, shell, cylinder, and dome; piezoelectric membrane materials are shown in Table 7 , including PZT [ 243 ], ZnO [ 244 , 245 ], AlN [ 246 ], PMN-PT [ 247 , 248 , 249 , 250 ], and PVDF [ 251 ], among others. The following table illustrates a comparison of various piezoelectric materials.…”

Section: Ultrasonic Fingerprint Recognitionmentioning

confidence: 99%

A Review of Fingerprint Sensors: Mechanism, Characteristics, and Applications

Niu

et al. 2023

Micromachines

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Identification technology based on biometrics is a branch of research that employs the unique individual traits of humans to authenticate identity, which is the most secure method of identification based on its exceptional high dependability and stability of human biometrics. Common biometric identifiers include fingerprints, irises, and facial sounds, among others. In the realm of biometric recognition, fingerprint recognition has gained success with its convenient operation and fast identif ication speed. Different fingerprint collecting techniques, which supply fingerprint information for fingerprint identification systems, have attracted a significant deal of interest in authentication technology regarding fingerprint identification systems. This work presents several fingerprint acquisition techniques, such as optical capacitive and ultrasonic, and analyzes acquisition types and structures. In addition, the pros and drawbacks of various sensor types, as well as the limits and benefits of optical, capacitive, and ultrasonic kinds, are discussed. It is the necessary stage for the application of the Internet of Things (IoT).

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“…In this study, the diaphragms are relatively thicker than a conventional one. 44,45) We examine the changes in the frequency characteristics for the case of a larger diaphragm, i.e., a relatively thin diaphragm. Figures 17 and 18 show the frequency characteristics for different aspect ratios.…”

Section: Receiving Frequency Bandwidthmentioning

confidence: 99%

Characteristic analysis of diaphragm-type transducer that is thick relative to its size

Ishiguro¹,

Zhu²,

Tagawa³

et al. 2017

Jpn. J. Appl. Phys.

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In recent years, high-performance piezoelectric micromachined ultrasonic transducers (PMUTs) have been fabricated by micro electro mechanical systems (MEMS) technology. For high-resolution imaging, it is important to broaden the frequency bandwidth. By reducing the diaphragm size to increase the resonance frequency, the film thickness becomes relatively larger and hence the transmitting and receiving characteristics may different from those of a usual thin diaphragm. In this study, we examine the performance of a square-diaphragm-type lead zirconate titanate (PZT) transducer through simulations. To realize the desired resonance frequency of 20 MHz, firstly, the diaphragm size and the thickness of the layers of PZT and Si constituting a PMUT are examined, and then, three PZT/Si models with different thicknesses are selected. Subsequently, using the models, we analyze the transmitting efficiency, transmitting bandwidth, receiving sensitivity (piezoelectric voltage/electric charge), and receiving bandwidth using an FEM simulator. It is found that the proposed models can transmit ultrasound independently of the diaphragm vibration and have wide bandwidth of the receiving frequency as compared with that of a typical PMUT.

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Modeling of circular piezoelectric micro ultrasonic transducer using CuAl10Ni5Fe4 on ZnO film for sonar applications

Cited by 13 publications

References 15 publications

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

A Review of Fingerprint Sensors: Mechanism, Characteristics, and Applications

Characteristic analysis of diaphragm-type transducer that is thick relative to its size

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