1997
DOI: 10.1109/55.596923
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Modeling of laser-annealed polysilicon TFT characteristics

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Cited by 63 publications
(31 citation statements)
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“…Although there has been research to analyze the grain-boundary in poly-Si TFTs, [26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41] this article analyzes the dependence on the grain-boundary location, following a brief report by the authors. 42 Figure 1 shows the structure of a poly-Si TFT for twodimensional ͑2D͒ device simulation.…”
Section: Introductionmentioning
confidence: 99%
“…Although there has been research to analyze the grain-boundary in poly-Si TFTs, [26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41] this article analyzes the dependence on the grain-boundary location, following a brief report by the authors. 42 Figure 1 shows the structure of a poly-Si TFT for twodimensional ͑2D͒ device simulation.…”
Section: Introductionmentioning
confidence: 99%
“…In the case of ALD and sputtered films, annealing can also reduce oxygen deficiency of as-grown films and improve crystal quality. Postgrowth annealing has a similar effect on nc-ZnO films as laser annealing has on poly-Si thin films [49][50][51]. The highest current density obtained was 800 mA/mm for 2 µ m gate length PLD ZnO devices.…”
Section: Performance Optimizationmentioning
confidence: 77%
“…Indeed, based on Table I, when pinning is considered at 200 mV above midgap, the summation of simulated individual contributions (σV T ≈ 62 mV at V ds of 50 mV, and σV T ≈ 67 mV at V ds of 1.1 V) becomes pretty close to the measured variability. Following [9], this Fermi-level pinning indicates a trap density equal to 1.5 * 10 14 /cm 2 , which is a realistic value [15], [16].…”
Section: Resultsmentioning
confidence: 99%