In this work the inuence of surface roughness on magnetostrictive nano-actuator parameters has been analyzed theoretically. A mechanical and magnetoelastic behavior of investigated cantilever bimorphic system has been described in the frame of the simple analytical model. Realistic material parameters have been incorporated into the model for high-magnetostrictive galfenol (Fe-Ga) thin lms on silicon substrate. It has been shown that for 5 nm thick galfenol lm a at surface magnetostrictive eects modify the cantilever deection and force only by 3%, whereas in the case of rough surface this inuence increases to about 15%, when dimensions of roughness steps are comparable to the distances between them.