Modeling of refractive index profiles of He+ ion-implanted KNbO3 waveguides based on the irradiation parameters

Abstract

Planar optical waveguides were fabricated by He+ ion implantation in KNb03 crystals with doses from 2.5 X 1014 to 1 X 1016 cm-' and energies from 1 to 3.5 MeV, and the index profiles were analyzed. A comparison with theoretical radiation damage profiles calculated by the TRIM code indicates that the index change is mainly caused by nuclear collisions. However, at higher implantation doses the influence of the electronic excitation on the refractive index profiles cannot be neglected. A method is derived to predict the index profile of nb from the He+ implantation parameters energy and dose. The measured mode spectra of waveguides produced by single and dual energy implantation are in excellent agreement with the predicted spectra. 6024

The fabrication of planar waveguides on Bi12TiO20 crystals by oxygen and helium ion implantation

“…3(a). Many methods have been developed to reconstruct the refractive index profile, including the inverse WentzelKramers-Brillouin [15] and the parameterised index profile reconstruction [16]. The mechanism for the change in refractive index attracts the interest of many researchers also, such as [17][18][19].…”

Blue-light second-harmonic generation in ion-implanted KNbO3 channel waveguides of new design

“…This increase of the PM wavelength with increase of the implantation dose is in agreement with the modeling of the corresponding refractive index profiles. 10 He ϩ ions and a dose of 3•10 15 cm Ϫ2 . Its cross section was approximately DϫBϭ4.5 m ϫ 18 m. The in-coupled fundamental power was 280 mW ͑assuming 1 dB coupling loss͒ leading to an absorption coefficient of 3 dB cm Ϫ1 for this guide and an overall conversion efficiency of 3.3% W Ϫ1 .…”

He Ion Implantation and the Refractive Index Depth Profile in Relaxor Ferroelectric Optical Waveguides

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