Modeling of the Magnetron Discharge

Spatial distributions of plasma parameters in conventional magnetron discharges in presence of nanoparticles

“…Meanwhile, electrons trapped in the high-field regions parallel to the cathode produce more ionization collisions. Modelling at low pressure (Bogaerts, Kolev & Buyle 2008) has shown that for the discharge sustainment carried out by secondary electrons ejected from the cathode, the maximum ionization rate is located under the racetrack, in the sheath and also for a significant amount in the cathode pre-sheath. It was shown that the latter can have widths of several centimetres in magnetrons operating with strong magnetic field (Shidoji & Makabe 2003) and low pressure (Bradley et al 2001;Shidoji & Makabe 2003).…”

Effect of processing conditions on residual stress in sputtered transition metal nitrides (TiN, ZrN and TaN): Experiments and modeling

“…The simulation was calculated by using 6 x 10 5 Ar + with incident energy of 340 eV or 6 x 10 5 N + with energy of 170 eV [48] (taken as half of the energy of Ar+). The incident energy of Ar + ions was taken as 75 % of the average target discharge voltage, considering the charge transfer collisions in the plasma sheath [49]. The threshold energy of atomic displacement in Ti, Zr, and Ta lattice was set as 30, 40, and 80 eV, respectively, referencing the work from Abadias [9,48] and the reference wherein it [50].…”

1‐D Self‐consistent Fluid Modelling of the Pulsed Magnetron Discharge

“…The usefulness of these magnetised plasmas has lead scientists and engineers to seek a better understanding of the fundamental plasma physical phenomena underlying their operation. This has included electrical, optical and mass spectroscopic diagnostic techniques [4,5] as well as sophisticated computer simulation. [6] In terms of modelling the magnetron, these low-pressure plasmas present a number of problems for computational time-steps.…”

“…Pure fluid approaches also have drawbacks in that they do not account for the fast secondary electrons generated at the magnetron cathode target, which are accelerated through the sheath to the bulk plasma. Therefore, a number of workers have developed fluid–hybrid codes, for instance in 2‐D geometry 14, 16, 18. Another problem discussed by Bogaerts and Kolev18 is how to adequately describe the cross‐field electron transport in the fluid approximation.…”

“…Therefore, a number of workers have developed fluid–hybrid codes, for instance in 2‐D geometry 14, 16, 18. Another problem discussed by Bogaerts and Kolev18 is how to adequately describe the cross‐field electron transport in the fluid approximation. It is known that the cross‐field diffusion rates in the magnetron (as in Hall thrusters) are anomalously high,19 often assumed to be Bohm diffusion.…”