In this work, the variation of single event transient (SET) pulse width for high-LET heavy ion irradiation in 16 nm bulk silicon Fin Field-Effect Transistor (FinFET) inverter chains with different driven strengths have been measured at different temperatures. Three-dimensional technology computer-aided design simulations are carried out to study the variation of SET pulse width and saturation current with temperature. Experimental and simulation results indicated that the increase in temperature would enhance the parasitic bipolar effect of bulk FinFET technology, resulting in the increase of SET pulse width. On the other hand, the increase in inverter driven strength will change the layout topology, which has a complex impact on the SET temperature effects of FinFET inverter chains. The experimental and simulation results show that the device with the strongest driven strength has the least dependence on temperature.