“…98,100 InP Indium phosphide (InP) is a III-V compound semiconductor with a direct bandgap structure and high carrier velocities, making it well-suited to a range of developed and emerging technologies including fiber-optic communication, 119 highspeed transistors, 120 lasers, 94 photonic integrated circuits, 58 photodiodes, 121,122 and high-frequency electronics. 123,124 The high electron mobility and direct bandgap allow for the development of InP optical and electronic devices requiring high frequency switching 17 as devices can discharge capacitance at a sufficient rate, improving the RC delay faced by conventional CMOS-based devices. 125 To date, the only InP devices fabricated by MacEtch have been produced using an inverse progression MacEtch, due to mass transport limitations of the InP semiconductor leading to hole diffusion and etching in offcatalyst areas.…”