The International Journal of Acoustics and Vibration 2020
DOI: 10.20855/ijav.2020.25.31670
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Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers

Abstract: The parametric and vibrational characteristics of PZTs (Piezoelectric Transducers) with different diameters before and after coupling are discussed by finite element analysis. It is shown that the vibration stability of the piezoelectric transducer decreases with increasing driving frequency. The PZT's variation of maximum displacement with frequency shows the same trend for different driving conditions according to vibration measurement under conditions of both free and forced vibration (before and after seal… Show more

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Cited by 6 publications
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“…Guan et al studied the effect of driving wave type, driving voltage, and driving frequency with three pump chamber diameters (i.e. 12 mm, 15 mm, 20 mm) [31]. The trends in the flow rate were the same, and the optimal diameter was 12 mm inside this micropump chamber.…”
Section: Introductionmentioning
confidence: 96%
“…Guan et al studied the effect of driving wave type, driving voltage, and driving frequency with three pump chamber diameters (i.e. 12 mm, 15 mm, 20 mm) [31]. The trends in the flow rate were the same, and the optimal diameter was 12 mm inside this micropump chamber.…”
Section: Introductionmentioning
confidence: 96%