Modelling and analysis of diaphragm integrated SU8/CB nanocomposite piezoresistive polymer microcantilever biosensor

Ansari, Mohd. Zahid; Bisen, Mahak; Cho, Chongdu

doi:10.1007/s00542-018-3777-6

Cited by 13 publications

(3 citation statements)

References 27 publications

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“…blood, urine or cerebrospinal fluid) interactions of biological species cause a collective surface stress on the membrane which can induce a measurable deflection of the NEMS part. The maximum deflection of the membrane under one moment load, according to Stoney's formula, can be calculated as [17]:…”

Section: Design and Analysis Of The Proposed Nems Transducermentioning

confidence: 99%

“…Thus, BioM/NEMS sensors can be addressed in biosensing platforms where they convert the reaction of a chemical or biological stimulus into a measurable mechanical displacement of a movable part [14]. This M/NEMS movable structure may be a cantilever beam [15,16], a fixed-fixed beam or a diaphragm which is typically designed for two different operational modes, known as dynamic and static modes [17]. The dynamic or resonance mode is sensitive to effective mass variations of the biotransducer so that the mass variations change the resonance frequency of the biosensor [18].…”

Section: Introductionmentioning

confidence: 99%

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A label-free biomarkers detection platform relied on a bilayer long-wave infrared metamaterials BioNEMS sensor

Marvi¹,

Jafari²

2022

Nanotechnology

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A novel approach based on optical BioNEMS (Biological-Nano-Electro-Mechanical-Systems) sensor is presented in this paper to provide highly sensitive and precise detection of biomolecules. The proposed BioNEMS sensor is relied on a bi-layer metamaterials structure, tuned by its wavelength. The presented biosensor consists of a BioNEMS membrane coated by complementary split ring resonators (CSRRs) and an array of SRR cells on the substrate. While the immobilized bioreceptors adsorb the biomarkers (i.e. mRNA or protein), it causes a bending of the suspended membrane. This is due to the differential surface stress which is induced on the NEMS structure. As a consequence, the coupling strength of two complementary metamaterial layers and thus the electromagnetic response of the biosensor are changed. Furthermore, the proposed device is designed and analyzed by numerical and analytical approaches in order to obtain its functional characteristics as follows: detection sensitivity of 21967 nm/RIU, FOM of 327.8, mechanical sensitivity of 2.6 µm and resonant frequency of 4.92 kHz. According to the obtained results, the functional characteristics of the proposed label-free biosensor show its high potential for highly sensitive and accurate molecule detections, disease diagnosis as well as drug delivery tests for Lab-On-Chip systems.

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Section: Design and Analysis Of The Proposed Nems Transducermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A label-free biomarkers detection platform relied on a bilayer long-wave infrared metamaterials BioNEMS sensor

Marvi¹,

Jafari²

2022

Nanotechnology

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“…The part which is responsible for this task is called MEMS transducer with a movable mechanical part. This MEMS part may be a cantilever beam [ 11 ], a fixed–fixed beam [ 12 ] or a diaphragm [ 13 ]. By detecting the magnitude and direction of this induced displacement, one can figure out the type and the number of target bioparticles.…”

Section: Introductionmentioning

confidence: 99%

A Proposal for a Novel Surface-Stress Based BioMEMS Sensor Using an Optical Sensing System for Highly Sensitive Diagnoses of Bio-particles

2021

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In this paper, a BioMEMS sensor by using a surface-stress sensing approach, connected to a highly sensitive optical sensing system, is proposed to diagnose various types of biomolecules. The MEMS transducer is composed of a fixed–fixed beam with immobilized receptors on the surface which is connected to a Ring Resonator (RR) filter. The interaction between the target biomolecules and the receptors induces surface stresses on the beam. This stress results in the beam deformation which leads to changes in the coupling coefficient of the RR. Consequently, the transmission spectrum of the RR experiences changes, measured by using an optical photo-detector. Therefore, by analyzing the response of the photo-detector output, one can detect the number of target biomolecules in the sample and assign a level of contamination, infection or bioparticles, caused by the specific disease. Furthermore, the MEMS functional characteristics and the optical properties of the proposed biosensor are designed and analyzed respectively by using the finite element method (FEM) and the finite difference time domain (FDTD) approach. The obtained functional characteristics of the proposed device show that the present optical BioMEMS sensor can be used for highly sensitive diagnoses of various types of diseases and their progress level.

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Fabrication and evaluation of a passive SU8-based micro direct glucose fuel cell

et al. 2018

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Modelling and analysis of diaphragm integrated SU8/CB nanocomposite piezoresistive polymer microcantilever biosensor

Cited by 13 publications

References 27 publications

A label-free biomarkers detection platform relied on a bilayer long-wave infrared metamaterials BioNEMS sensor

A label-free biomarkers detection platform relied on a bilayer long-wave infrared metamaterials BioNEMS sensor

A Proposal for a Novel Surface-Stress Based BioMEMS Sensor Using an Optical Sensing System for Highly Sensitive Diagnoses of Bio-particles

Fabrication and evaluation of a passive SU8-based micro direct glucose fuel cell

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