A Proposal for a Novel Surface-Stress Based BioMEMS Sensor Using an Optical Sensing System for Highly Sensitive Diagnoses of Bio-particles

Abstract

In this paper, a BioMEMS sensor by using a surface-stress sensing approach, connected to a highly sensitive optical sensing system, is proposed to diagnose various types of biomolecules. The MEMS transducer is composed of a fixed–fixed beam with immobilized receptors on the surface which is connected to a Ring Resonator (RR) filter. The interaction between the target biomolecules and the receptors induces surface stresses on the beam. This stress results in the beam deformation which leads to changes in the coupling coefficient of the RR. Consequently, the transmission spectrum of the RR experiences changes, measured by using an optical photo-detector. Therefore, by analyzing the response of the photo-detector output, one can detect the number of target biomolecules in the sample and assign a level of contamination, infection or bioparticles, caused by the specific disease. Furthermore, the MEMS functional characteristics and the optical properties of the proposed biosensor are designed and analyzed respectively by using the finite element method (FEM) and the finite difference time domain (FDTD) approach. The obtained functional characteristics of the proposed device show that the present optical BioMEMS sensor can be used for highly sensitive diagnoses of various types of diseases and their progress level.

Multilayer Heterogeneous Membrane Biosensor Based on Multiphysical Field Coupling for Human Serum Albumin Detection

“…The MHBios’ resistance modifies with the deformation of the MXene membrane. ,, Surface stress was produced by the specific binding of anti-HSA and HSA to the sensitive layer. Surface tension caused the MXene membrane’s structure to alter, which changed the conductive route through the membrane. , Additionally, the magnetic nanoparticles move on the MHBios surface under the influence of a uniform magnetic field as a result of magnetic Fe 3 O 4 sensitization. This causes the PDMS membrane to deform more, which shortens the conductive route and increases resistance.…”

Membrane-Based NEMS/MEMS Biosensors

“…51 Optical readout systems have several advantages, including high sensitivity, high immunity to electromagnetic interference, and a good performance according to the thermal stability. 18 However, they have some drawbacks, including limited potential for miniaturization and unsuitability for use in opaque liquids. 27 Moreover, the process of laser alignment is time consuming, thus diminishing the practicability of optical sensors for extensive arrays.…”

“…13,14 The transducer of MEMS/NEMS biosensors is commonly a movable mechanical part such as a cantilever, 15 a double-sided fixed beam, 16 or a membrane 17 that is deflected upon the occurrence of a recognition event at the biosensing film. 18 The sensing mechanism of such movable transducers works in two different modes including static and dynamic modes. In static mode, generally the reaction between the bioreceptor and the target object causes a surface stress, which consequently induces a deflection of the moving mechanical element.…”

“…Therefore, the design of biosensors requires a wide range of scientific and technical knowledge such as biochemistry, solid-state physics, surface chemistry, electrical engineering, etc . Recently, advances in micromachining and nanotechnology have made it possible to integrate the biosensing film, transducer, and partial readout system into a single device, enabling the fabrication of small and low-cost micro/nanoelectromechanical system (MEMS/NEMS) biosensors for continuous and in situ monitoring of the analyte of interest, even at trace levels. , The transducer of MEMS/NEMS biosensors is commonly a movable mechanical part such as a cantilever, a double-sided fixed beam, or a membrane that is deflected upon the occurrence of a recognition event at the biosensing film . The sensing mechanism of such movable transducers works in two different modes including static and dynamic modes.…”

In-Situ Integration of 3D C-MEMS Microelectrodes with Bipolar Exfoliated Graphene for Label-Free Electrochemical Cancer Biomarkers Aptasensor

“…The suitability of electrochemical aptasensors for POC biosensing can be further explained by the fact that the cost of fabrication and operation can be considerably reduced. For instance, deploying novel synthesis techniques such as bipolar exfoliation can reduce the cost of fabrication [15][16][17][18]. Moreover, label-free electrochemical detection can reduce the cost of operation and blood sample consumption by requiring relatively simple sample preparation [19][20][21][22]; although, the performance of the proposed label-free electrochemical aptasensors (e.g., dynamic range, selectivity, and sensitivity) lags the performance of other sensing techniques such as optical and labeled aptasensors, which indicates the necessity of additional improvements.…”