Modelling and simulation of MEMS electromagnetic scanner control

Sergiu, Dumitru; Daniel, Comeaga Constantin; Anghel, Constantin; Mihail, Morega Alexandru

doi:10.1109/icmsc.2017.7959465

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“…Previously was proposed an improved voltagecontrolled Howland current source, called Advanced Current Source [7].…”

Section: The Simulink Modelsmentioning

confidence: 99%

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Modelling and Simulation for Control of a Mems Electromagnetic Scanner

2017

IJOMAM

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Abstract:The article presents the mathematical modelling and simulation models of a MEMS electromagnetic scanning system, with the aim to discuss sources of nonlinear behavior and to compare voltage vs. current control modes. The electromagnetic (EM) actuators develop high forces at any scale, and can be used at both resonance or far from it. This study completes previous design and manufacturing work of the electro-mechanical structure and its electric supply circuits. A nonlinear mathematical model for a general case, with the main actuator connected to a second elastic system carrying the mirror, and the particular mathematical model for infinite contact impedance between the actuator and the mirror support, allowing use of a single degree of freedom model for the mechanical part, are presented. The models are simplified for current control strategy discussion, and their SIMULINK implementation is included altogether with the results of simulations that confirm the advantages of the current control.

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“…Previously was proposed an improved voltagecontrolled Howland current source, called Advanced Current Source [7].…”

Section: The Simulink Modelsmentioning

confidence: 99%

“…The first technique was used to prove the feasibility of the actuator and for the preliminary design of the actuator and electric circuit [3,5,6,7].…”

Section: The Linear Mathematical Modellingmentioning

confidence: 99%

Modelling and Simulation for Control of a Mems Electromagnetic Scanner

2017

IJOMAM

View full text Add to dashboard Cite

show abstract

Modelling and simulation of MEMS electromagnetic scanner control

Cited by 1 publication

References 6 publications

Modelling and Simulation for Control of a Mems Electromagnetic Scanner

Modelling and Simulation for Control of a Mems Electromagnetic Scanner

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