2009 IEEE International Conference on 3D System Integration 2009
DOI: 10.1109/3dic.2009.5306592
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Modelling of Through Silicon Via RF performance and impact on signal transmission in 3D integrated circuits

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Cited by 34 publications
(6 citation statements)
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“…Instead, an extensive amount of work has been done to model a single signal-ground pair of TSV analytically. In [7], [9], and [10], a parametric and frequency-dependent equivalent circuit model is developed by employing EM simulations. In [8], an MIS structure signal-ground TSV equivalent circuit model is proposed based on TSV physics and closed-form equations.…”
Section: Preliminary On Tsv Modelingmentioning
confidence: 99%
“…Instead, an extensive amount of work has been done to model a single signal-ground pair of TSV analytically. In [7], [9], and [10], a parametric and frequency-dependent equivalent circuit model is developed by employing EM simulations. In [8], an MIS structure signal-ground TSV equivalent circuit model is proposed based on TSV physics and closed-form equations.…”
Section: Preliminary On Tsv Modelingmentioning
confidence: 99%
“…Between two adjacent TSVs, coupling capacitance Cc is calculated as 4.0 fF, and mutual inductance Lm as 4.5 pH. Parameters of various TSV structures are listed in Table III. For a frequency range above 1 GHz, signal-ground (S-G) or ground-signal-ground (G-S-G) structures are required [13,14]. A TSV equivalent circuit model is proposed in which the parasitic were extracted by fitting the measurement-based S parameter up to 20 GHz [13,14].…”
Section: B Tsv Modelsmentioning
confidence: 99%
“…The empirical π-type equivalent-circuit model for TSV was investigated in [3]. The model with transmission line-based circuits used curve fitting to achieve optimization.…”
Section: Introductionmentioning
confidence: 99%