The paper presents a nonlinear coupled nonisothermal model of the process of material implementation into the target surface under conditions of surface treatment by a particle beam in the form of one or few consecutive pulses. The model takes into account the interaction of impurity diffusion, heat propagation, and mechanical disturbances, as well as the chemical reaction between the introduced impurity and the target material. The problem is solved numerically using an implicit symmetric difference scheme of the second‐order approximation in time and spatial coordinates. The results of solution are obtained for different time intervals. It was found that the interaction of different processes leads to the appearance of distortions in the front of waves. The distributions of temperature and impurity concentration have a wave character. The increment of the reaction product in the dynamics for different numbers of pulses is presented. The interaction mechanisms of the studied processes do not change and do not depend on the number of pulses. However, a more complicated picture is observed under treatment by several successive pulses due to the appearance of new extremes and distortions.