Modified layer formation by means of high current density nitrogen and boron implantation

Углов, В.В.; Rusalsky, D.P.; Khodasevich, V.V.; Kholmetskii, Alexander; Wei, Ronghua; Vajo, John J.; Rumyanceva, I.N.; Wilbur, P. J.

doi:10.1016/s0257-8972(98)00407-1

Cited by 18 publications

(4 citation statements)

References 8 publications

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“…However, the maximum hardness observed on steel treated by these methods was 15-20 GPa, 1,3,4,7,8,12 whereas a hardness of ϳ25 GPa was obtained for samples after PI 3 ͑see Fig. 4 and 5͒ that the phase transition of steel from the initial state into austenite highly ͑up to 40 at.…”

Section: Resultsmentioning

confidence: 91%

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Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Углов

Khodasevich

Kuleshov

et al. 1999

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inMicrostructure and property modifications of an AISI H13 (4Cr5MoSiV) steel induced by pulsed electron beam treatment J.Investigation of low-pressure elevated-temperature plasma immersion ion implantation of AISI 304 stainless steel Process window and mechanism of surface property enhancement of 9Cr18 steel using plasma immersion ion implantation J.Plasma immersion (PI 3 ) ion implantation of AISI M2 steel by nitrogen was carried out. The implantation voltage was 40 kV and the doses varied in the range of 2 -8ϫ10 18 ions/cm 2 . It is established that the hardness of steel increases up to 25 GPa, the friction coefficient decreases by the factor of 2 and wear resistance is enhanced by a factor of 10 after PI 3 . It is explained by the formation of a highly doped face-centered-cubic ␥-Fe͑N,C͒ phase that is due to local tempering of the steel surface. The total concentration of nitrogen and carbon in this phase is about 40 at. %.

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Section: Resultsmentioning

confidence: 91%

“…There are several economically effective methods of ion-beam treatment: plasma nitriding, 1,2 low energy high current ion implantation 3,4 and plasma immersion (PI 3 ) ion implantation. The application of ion beams with energies of about 1 MeV is not economically profitable.…”

Section: Introductionmentioning

confidence: 99%

Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Углов

Khodasevich

Kuleshov

et al. 1999

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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“…Хирвонен одним из первых показал [34], что это ограничение можно снять имплан-тацией ионов нескольких типов. В последнее время все большее внимание уделяется исследованию материалов после двойной им-плантации [35][36][37]. При этом появляется возможность получения метастабильных структур, аморфных и вторичных фаз.…”

Section: имплантация ионов нескольких типовunclassified

Influence of an irradiation of electronic and ionic beams on physicomechanical properties of titanic alloys

2004

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Влияние облучения электронными и ионными пучками на физико-механические свойства титановых сплавов А. Д. Погребняк, Е. А. Базыль, Н. В. СвириденкоСумский институт модификации поверхности, ул. Роменская, 87, корпус «М», а/я 163, 40030 Сумы, Украина Представлен обзор современного состояния методов обработки титана и его сплавов электронными, ионными пучками, комплексного облуче-ния. Использование такого воздействия способствует улучшению физи-ко-механических свойств материалов. Показано, что использование комплексной обработки приводит к заметному изменению механиче-ских характеристик титана и титановых сплавов.Представлено огляд сучасного стану методів обробки титану та його сплавів електронними, іонними пучками, комплексного опромінення. Використання такого впливу сприяє поліпшенню фізико-механічних властивостей матеріалів. Показано, що використання комплексної обробки приводить до значних змін механічних характеристик титану та титанових сплавів.The review of the current state of the methods applied to treat the titanium and its alloys using the electron, ion beams and their combination is presented. Application of such a treatment provides the improvement of physical and mechanical properties of these materials. As shown, the combined treatment results in the essential change of the mechanical characteristics of the titanium and its alloys.Ключевые слова: титан, титановые сплавы, метод обработки.(Получено 2 июля 2003 г.; окончат. вариант -17 декабря 2003 г.)

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“…Implantation can cause changes in surface composition, morphology and chemical bond structure leading to the formation of new compounds and can also be an effective method to improve mechanical and chemical properties [9][10][11][12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Nitrogen ion implantation and characterization of tungsten oxide films

Tesfamichael

Bell

2005

SPIE Proceedings

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This paper implements modification of tungsten oxide film using ion implantation and a physical characterization of the film. The film was implanted with nitrogen at energies between 10 keV and 40 keV and ion dose range 10 14 -10 16 cm -2 .The surface morphology of the film after implantation has been modified as observed using electron microscopy. The transmittance of the film was found to decrease with increasing implantation energy and ion dose as measured using conventional spectrophotometer. Depth profile of nitrogen was analyzed using Secondary Ion Mass Spectroscopy (SIMS) and found a peak of nitrogen across the depth of the implanted layer. The amount of nitrogen was found to increase with increasing ion dose and energy. From electron diffraction a broader diffraction rings were revealed from both the implanted and un-implanted layers, indicating that the crystalline properties of the tungsten oxide film after ion implantation remains the same.

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Modified layer formation by means of high current density nitrogen and boron implantation

Cited by 18 publications

References 8 publications

Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Influence of an irradiation of electronic and ionic beams on physicomechanical properties of titanic alloys

Nitrogen ion implantation and characterization of tungsten oxide films

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