Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Углов, В.В.; Khodasevich, V.V.; Kuleshov, A.K.; Fedotova, J.; Rusalsky, D.P.; Guenzel, R.; Richter, E.

doi:10.1116/1.590665

Cited by 9 publications

(1 citation statement)

References 11 publications

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“…Much work focused on improvement of components made from stainless steel [86][87][88][89][90][91][92][93][94][95][96][97][98][99], tool steel [6,19,45,[100][101][102][103][104][105][106][107][108][109], tungsten carbide [110], nickel alloys [6,111], chromium [112], pure aluminum [113,114] and titanium and aluminum alloys [20,49,[115][116][117][118][119][120][121]. Möller and coworkers [122] describe PBII of nitrogen as "favorable boundary conditions for the efficiency of diffusive surface treatment."…”

Section: A Reduction Of Wear and Corrosion Applications In Metallurgymentioning

confidence: 99%

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

175

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After pioneering work in the 1980s, plasma-based ion implantation (PBII) and plasma-based ion implantation and deposition (PBIID) can now be considered mature technologies for surface modification and thin film deposition. This review starts by looking at the historical development and recalling the basic ideas of PBII. Advantages and disadvantages are compared to conventional ion beam implantation and physical vapor deposition for PBII and PBIID, respectively, followed by a summary of the physics of sheath dynamics, plasma and pulse specifications, plasma diagnostics, and process modelling. The review moves on to technology considerations for plasma sources and process reactors. PBII surface modification and PBIID coatings are applied in a wide range of situations. They include the by-now traditional tribological applications of reducing wear and corrosion through the formation of hard, tough, smooth, low-friction and chemically inert phases and coatings, e.g. for engine components. PBII has become viable for the formation of shallow junctions and other applications in microelectronics. More recently, the rapidly growing field of biomaterial synthesis makes used 1 of PBII&D to produce surgical implants, bio-and blood-compatible surfaces and coatings, etc.With limitations, also non-conducting materials such as plastic sheets can be treated. The major interest in PBII processing originates from its flexibility in ion energy (from a few eV up to about 100 keV), and the capability to efficiently treat, or deposit on, large areas, and (within limits) to process non-flat, three-dimensional workpieces, including forming and modifying metastable phases and nanostructures.We use the acronym PBII&D when referring to both implantation and deposition, while PBIID implies that deposition is part of the process.2

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Section: A Reduction Of Wear and Corrosion Applications In Metallurgymentioning

confidence: 99%

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

175

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Structure-phase transformations in high-speed steel treated by compression plasma flow

Cherenda

Углов

Анищик

et al. 2005

Vacuum

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CEMS investigations of AISI M2 steel after ion implantation by nitrogen, boron and carbon

Kholmetskii¹,

Anischik²,

Углов³

et al. 2003

Vacuum

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Plasma immersion ion implantation for improvement of mechanical properties of AISI M2 steel

Cited by 9 publications

References 11 publications

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Structure-phase transformations in high-speed steel treated by compression plasma flow

CEMS investigations of AISI M2 steel after ion implantation by nitrogen, boron and carbon

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