2002
DOI: 10.1007/s11664-002-0048-0
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Moisture absorption studies of fluorocarbon films deposited from pentafluoroethane and octafluorocyclobutane plasmas

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Cited by 13 publications
(7 citation statements)
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“…A similar oxidation and low-molecular-weight oxidized material (LMWOM) formation process was reported in moisture uptake studies on plasma-deposited fluorocarbon films [47]. In this work however, the FT-IR signal did not show much variation in intensity, indicating that this mechanism was probably not the major reason of degradation.…”
Section: Resultssupporting
confidence: 78%
See 1 more Smart Citation
“…A similar oxidation and low-molecular-weight oxidized material (LMWOM) formation process was reported in moisture uptake studies on plasma-deposited fluorocarbon films [47]. In this work however, the FT-IR signal did not show much variation in intensity, indicating that this mechanism was probably not the major reason of degradation.…”
Section: Resultssupporting
confidence: 78%
“…Thus the first pathway (by secondary carbons, pathway II) yields a variety of oxidized carbon functionalities with a low molecular weight, due to chain scission. A similar oxidation and low-molecular-weight oxidized material (LMWOM) formation process was reported in moisture uptake studies on plasma-deposited fluorocarbon films [ 47 ]. In this work however, the FT-IR signal did not show much variation in intensity, indicating that this mechanism was probably not the major reason of degradation.…”
Section: Resultsmentioning
confidence: 73%
“…It can be noted that the loss of fluorine and oxidation were more important for the nondeformed and aged samples etched X8. The instability of fluorocarbon films in aqueous medium could be explained by the formation of low-molecular-weight oxidized chains on the coating surface during the plasma deposition, as already described by Tanikella et al 64 and Touzin et al 58 Indeed, these chains are easily breakable and, upon aging, leave the surface and consequently, the fluorine concentration decreased. Similar observations were made after deformation followed by aging: oxidation and loss of fluorine were also observed with the three etching conditions.…”
Section: Coating Characterization the Surface Composition Wasmentioning
confidence: 74%
“…The increase of the O/C ratio could be associated with postoxidation during aging, which seems to be more important than contamination. [ 21,36,37 ] Concerning the acrylic acid‐based codeposits, no significant change of F/C and O/C ratios is observed between fresh and aged coatings, which are from 0.33 to 0.67 and from 0.24 to 0.43, respectively. These observations indicate that the aging effect is less marked for p‐AA‐co‐HDFD than p‐DAME‐co‐HDFD; in other words, p‐AA‐co‐HDFD resists hydrocarbon contamination more efficiently than p‐DAME‐co‐HDFD.…”
Section: Resultsmentioning
confidence: 99%