Moisture diffusion in poltimide films in integrated circuits

Denton, Denice D.; Day, David R.; Priore, D. F.; Senturia, S.D.; Anolick, Eugene S.; Scheider, D.

doi:10.1007/bf02656671

Cited by 146 publications

(39 citation statements)

References 7 publications

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“…Polyimide is a slightly hydrophilic material, being able to absorb moisture up to 3% of its dry weight [24], [50]. Because of the high dielectric permittivity of water in comparison with the dielectric permittivity of dry polyimide , even relatively small amounts of water increase the dielectric permittivity of polyimide by as much as 30% [53], [54]. Table 1 shows the variation of the electrical properties of Kapton with relative humidity at room temperature, assuming that the material has been allowed enough time to achieve moisture concentration equilibrium with the ambient environment.…”

Section: ) Centimeter and Millimeter Scale Substratesmentioning

confidence: 99%

“…Further advances in humidity measurement techniques involved the inclusion of moisture diffusion processes into the model of the Kapton sensor response [54]. The moisture diffusion coefficient was extracted from the dew point cycle measurements.…”

Section: A Humidity and Moisture Sensingmentioning

confidence: 99%

“…Because of electrode polarization double-layer effects, the reported measurement was limited to the single frequency of 10 kHz. The dynamic analysis relies on the evidence available from the literature that the dielectric constant changes linearly with moisture content in polyimides [54] and epoxies [131]. A one-dimensional diffusion process is modeled with the traditional solution to Fick's law [132].…”

Section: A Humidity and Moisture Sensingmentioning

confidence: 99%

“…The electrode capacitances result from the space-charge polarization associated with the electrical double layer while the bulk properties of the liquid are given by and . The lumped elements are related to the liquid dielectric properties by (54) with the area, the electrode spacing, the liquid conductivity, the liquid permittivity and with the characteristic Debye length over which the space-charge is distributed. The geometric factor is determined by measuring the capacitance of the structure in air C .…”

Section: ) Concentration Of Gases and Vaporsmentioning

confidence: 99%

“…Estimating these properties requires a minimum of two impedance measurements. With the permittivity of the fluid obtained from a high-frequency measurement, a low-frequency measurement (such as 10 mHz, where the double-layer effects are apparent) can be used with (54) and the model test cell impedance to give (55) (56) This approach was used to estimate the material properties and generate the Cole-Cole plot given in Fig. 38.…”

Section: ) Concentration Of Gases and Vaporsmentioning

confidence: 99%

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Interdigital sensors and transducers

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Section: ) Centimeter and Millimeter Scale Substratesmentioning

confidence: 99%

Section: A Humidity and Moisture Sensingmentioning

confidence: 99%

Section: A Humidity and Moisture Sensingmentioning

confidence: 99%

Section: ) Concentration Of Gases and Vaporsmentioning

confidence: 99%

Section: ) Concentration Of Gases and Vaporsmentioning

confidence: 99%

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Preparation and properties of soluble aromatic polyetherimides based on 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]hexafluoropropane dianhydride

Lee

Koo

Kim

et al. 2000

J. Appl. Polym. Sci.

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Aromatic polyetherimides were synthesized from a fluorine containing aromatic carboxylic acid dianhydride, 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]-hexafluoropropane dianhydride (6F-BABPA) and five typical aromatic diamines including 1,1-bis(4-aminophenyl)-1-phenyl-2,2,2-trifluoroethane (3F-DAM) by two-step procedures-amidation to polyamic acids (PAA), followed by thermal imidization of PAA. The chemical and physical properties of the newly prepared polyetherimides (PEI) were compared in terms of their chemical structures, inherent viscosities, mechanical, and thermal properties. All polyetherimides were well soluble in common organic solvents such as N-methyl-2-pyrolidone (NMP), N,N-dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), pyridine, and methylene chloride. A PEI prepared from 6F-BABPA/3F-DAM was especially easily dissolved in NMP. The glass transition temperature (T g ) range of the obtained PEI was 209 -257°C. The dielectric constants and refractive index were 2.8 -3.2 and 1.61-1.56, respectively. The polyetherimide, 6F-BABPA/BAPP, with a low fluorine content (11.4% fluorine content), has 0.99% water absorption, whereas the polyetherimide, 6F-BABPA/4-BDAP, having a high fluorine content (26.0% fluorine content) showed 0.35% of water absorption.

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Water-sorption behavior ofP-phenylene diamine-based polyimide thin films

Seo

Lee

et al. 2000

J. Appl. Polym. Sci.

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Four different p‐PDA–based polyimide thin films were prepared from their respective poly(amic acid)s through thermal imidization at 400°C: poly(p‐phenylene pyromellitimide) (PMDA‐PDA); poly(p‐phenylene biphenyltetra carboximide) (BPDA‐PDA); poly(p‐phenylene 3,3′,4,4′‐oxydiphthalimide) (ODPA‐PDA); and poly(p‐phenylene 4,4′‐hexafluoroisopropylidene diphthalimide) (6FDA‐PDA). Water‐sorption behaviors of polyimide films were gravimetrically investigated at 25°C and 22–100% relative humidity by using the modified electromicrobalance (Thin Film Diffusion Analyzer). The diffusion coefficients of water for the polyimides varies in the range of 1.6 to 10.5 × 10−10 cm2/s, and are in the increasing order: BPDA‐PDA < PMDA‐PDA ∼ ODPA‐PDA < 6FDA‐PDA. The water uptakes of polyimides vary from 1.46 to 5.80 wt %, and are in the increasing order: BPDA‐PDA < ODPA‐PDA < 6FDA‐PDA < PMDA‐PDA. The water‐sorption behaviors for the p‐PDA–based polyimides are closely related to the morphological structure; specifically, the diffusion coefficients in p‐PDA–based polyimide thin films are closely related to the in‐plane orientation and mean intermolecular distance, whereas the water uptakes are affected by the packing order. © 2000 John Wiley & Sons, Inc. J Appl Polym Sci 76: 1315–1323, 2000

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Moisture diffusion in poltimide films in integrated circuits

Cited by 146 publications

References 7 publications

Interdigital sensors and transducers

Interdigital sensors and transducers

Preparation and properties of soluble aromatic polyetherimides based on 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]hexafluoropropane dianhydride

Water-sorption behavior ofP-phenylene diamine-based polyimide thin films

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