Molecular Beam Epitaxy 2018
DOI: 10.1016/b978-0-12-812136-8.00001-3
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Molecular Beam Epitaxy of Transition Metal Monopnictides

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“…The growth rate is limited by the Ta flux, while excess As is not incorporated into the film. This is similar to GaAs epitaxy, where stoichiometric growth may be achieved over a wide range of As/Ga flux ratios, and is consistent with other metal monopnictide systems [21]. Changes in growth temperature are likely achieving two things: 1) thermodynamically shifting which phase is the most energetically stable, and 2) modifying the effective As/Ta ratio as more As desorbs at higher temperatures.…”
Section: Resultssupporting
confidence: 82%
“…The growth rate is limited by the Ta flux, while excess As is not incorporated into the film. This is similar to GaAs epitaxy, where stoichiometric growth may be achieved over a wide range of As/Ga flux ratios, and is consistent with other metal monopnictide systems [21]. Changes in growth temperature are likely achieving two things: 1) thermodynamically shifting which phase is the most energetically stable, and 2) modifying the effective As/Ta ratio as more As desorbs at higher temperatures.…”
Section: Resultssupporting
confidence: 82%