2012
DOI: 10.1002/sia.4913
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Molecular depth profiling

Abstract: Bombardment of molecular solids with polyatomic projectiles allows interrogation of the sample with reduced chemical damage accumulation. Hence, it is now common to perform depth profiling experiments using a variety of substrates in a fashion similar to that reported for inorganic materials ‐ in use for many decades. The possibility for chemical processes, however, creates a number of fundamental differences between organic and inorganic materials. To retain molecular information during beam‐induced erosion, … Show more

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Cited by 29 publications
(20 citation statements)
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“…37 During the erosion process, there is some chemical damage buildup, but mass spectra characteristic of the composition of target can still be acquired. 37,38 This mode of operation is referred to as molecular depth profiling. 38 With model systems, a depth resolution of 30 nm has been achieved using C 60 + projectiles.…”
mentioning
confidence: 99%
“…37 During the erosion process, there is some chemical damage buildup, but mass spectra characteristic of the composition of target can still be acquired. 37,38 This mode of operation is referred to as molecular depth profiling. 38 With model systems, a depth resolution of 30 nm has been achieved using C 60 + projectiles.…”
mentioning
confidence: 99%
“…As a consequence, an overcritical pressure develops in the subsurface region which results in a rapid expansion of material into the vacuum. This ''phase explosion'' [4] leads to the emission not only of more sputtered particles, but also larger intact clusters and molecules, thereby making the cluster bombardment an important tool for molecular chemical surface analysis [5].…”
Section: Introductionmentioning
confidence: 99%
“…Results are more problematic for organic compounds where the ionization mechanism often involves protonation or other charge transfer processes [5]. This class of compounds is now particularly important due to a growing focus on organic electronics [6], bioimaging [7] and molecular depth profiling [810], applications made possible by the emergence of primary ions consisting of various molecular clusters, such as SF 5 + , C 60 + and Ar n + (n=1,000 – 10,000) [1114]. …”
Section: Introductionmentioning
confidence: 99%