Molecular dynamic simulation on boron cluster implantation for shallow junction formation

Li, Yuan; Yu, Min; Li, Wei; Ji, Huihui; Ren, Liming; Zhan, Kai; Huang, Ru; Zhang, Xing; Wang, Yangyuan; Zhang, Jinyu; Oka, Hiroyuki

doi:10.1016/j.nimb.2006.08.003

Cited by 10 publications

(4 citation statements)

References 5 publications

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“…46 This substantial increase in the rate of deposition provides an opportunity for soft landing of massselected ions to enter the manufacturing of high-value components such as solar cells 47 and shallow junctions in integrated circuits. 48 High capacity plasma-based processes that operate at ambient pressure and elevated temperatures are currently used in the large scale industrial production of bare nanopowders. 49 These commercial techniques employ both liquid and solid precursors and are capable of preparing from gram to kilogram quantities of bare nanopowders per hour.…”

Section: Introductionmentioning

confidence: 99%

Soft landing of bare nanoparticles with controlled size, composition, and morphology

2015

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Physical synthesis employing magnetron sputtering and gas aggregation in a modified commercial source has been coupled with size-selection and ion soft landing to prepare bare nanoparticles on surfaces with controlled coverage, size, composition, and morphology. Employing atomic force microscopy (AFM) and scanning electron microscopy (SEM), it is demonstrated that the size and coverage of nanoparticles on flat and stepped surfaces may be controlled using a quadrupole mass filter and the length of deposition, respectively. AFM shows that nanoparticles bind randomly to flat surfaces when soft landed at relatively low coverage (4 × 10(4) ions μm(-2)). On stepped surfaces at intermediate coverage (4 × 10(5) ions μm(-2)) nanoparticles bind along step edges forming extended linear chains. At the highest coverage (2 × 10(6) ions μm(-2)) nanoparticles form a continuous film on flat surfaces. On one surface with sizable defects, the presence of localized imperfections results in agglomeration of nanoparticles onto these features and formation of neighboring zones devoid of particles. Employing high resolution scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS) the customized magnetron sputtering/gas aggregation source is demonstrated to produce bare single metal particles with controlled morphology as well as bimetallic alloy nanoparticles with defined core-shell structures of that are of interest to catalysis.

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Section: Introductionmentioning

confidence: 99%

Soft landing of bare nanoparticles with controlled size, composition, and morphology

2015

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“…An additional coulomb function [4] is used to describe the effect of polarization field in III-nitride materials. The covalent bonds between group-III atoms and N atoms are simulated by ZBL-SW potential function [5].…”

Section: Model Setup and Resultsmentioning

confidence: 99%

On the Stability of Fluorine Ions in AlGaN/GaN System: a Theoretical Study

Wang

Chen

2008

Extended Abstracts of the 2008 International Conference on Solid State Devices and Materials

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“…In addition, a new “matrix assembly cluster source” has been introduced by Palmer and coworkers with the potential for scale up to produce milliamps of current . This substantial increase in deposition rate provides an unparalleled opportunity for SL of mass-selected ions to enter the manufacturing of high-value components including solar cells, shallow junctions in integrated circuits, and energy-storage devices …”

Section: Rational Design Of Interfaces Using Ion Soft Landingmentioning

confidence: 99%

Soft Landing of Complex Ions for Studies in Catalysis and Energy Storage

2016

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Immobilization of complex molecules and clusters on supports plays an important role in a variety of disciplines including materials science, catalysis, and biochemistry. In particular, deposition of clusters on surfaces has attracted considerable attention due to their nonscalable and highly size-dependent properties. The ability to precisely control the composition and morphology of complex molecules and clusters on surfaces is crucial for the development of next-generation materials with rationally tailored properties. Soft and reactive landing of ions onto solid or liquid surfaces introduces unprecedented selectivity into surface modification by completely eliminating the effect of solvent and sample contamination on the quality of the film. The ability to select the mass-to-charge ratio of the precursor ion, its kinetic energy, and charge state along with precise control of the size, shape, and position of the ion beam on the deposition target makes soft landing an attractive approach for surface modification. High-purity uniform thin films on surfaces generated using mass-selected ion deposition facilitate understanding of critical interfacial phenomena relevant to catalysis, energy generation and storage, and materials science. Our efforts have been directed toward understanding charge retention by soft-landed complex ions, which may affect their structure, reactivity, and stability. Specifically, we have examined the effect of the surface on charge retention by both positively and negatively charged ions. We found that the electronic properties of the surface play an important role in charge retention by cations. Meanwhile, the electron binding energy is a key factor determining charge retention by anions. These findings provide the scientific foundation required for the rational design of interfaces for advanced catalysts and energy-storage devices. Further optimization of electrode–electrolyte interfaces for applications in energy storage and electrocatalysis may be achieved by understanding and controlling the properties of soft-landed ions.

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Molecular dynamic simulation on boron cluster implantation for shallow junction formation

Cited by 10 publications

References 5 publications

Soft landing of bare nanoparticles with controlled size, composition, and morphology

Soft landing of bare nanoparticles with controlled size, composition, and morphology

On the Stability of Fluorine Ions in AlGaN/GaN System: a Theoretical Study

Soft Landing of Complex Ions for Studies in Catalysis and Energy Storage

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