Molecular dynamics simulations of surface smoothing and sputtering process with glancing-angle gas cluster ion beams

Aoki, Takaaki; Matsuo, Jiro

doi:10.1016/j.nimb.2007.01.048

Cited by 14 publications

(11 citation statements)

References 7 publications

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“…As a result, the molecules are also emitted with a marked oblique take off angle (~70°). A similar behavior has been observed for large argon clusters, and it might be related to the surface smoothing capability of these clusters …”

Section: Molecular Desorption and Incidence Anglesupporting

confidence: 80%

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Surface sputtering with nanoclusters: the relevant parameters

Delcorte

Restrepo

Czerwinski

et al. 2012

Surface & Interface Analysis

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In this contribution, we compare the results of our recent molecular dynamics simulations with data already published by us and by other authors to identify the relevant physical parameters governing observables such as the range, the damaged volume, the crater shape, the sputtering yield, the emission of molecules and fragments, and the chemical reactions induced in organic solids by cluster projectiles. Among the considered physical quantities, we show for instance that the total cluster energy, the energy per atom/per nucleon in the cluster and, importantly, the mass matching between the cluster and target constituents have a major effect on the physics of the interaction. The evolution of the observables as a function of these basic physical parameters is illustrated and discussed as well as certain implications for organic surface characterization using cluster ion beams.

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Section: Molecular Desorption and Incidence Anglesupporting

confidence: 80%

“…A similar behavior has been observed for large argon clusters, and it might be related to the surface smoothing capability of these clusters. [28] Induced chemistry…”

Section: Sputtering and Energymentioning

confidence: 99%

Surface sputtering with nanoclusters: the relevant parameters

Delcorte

Restrepo

Czerwinski

et al. 2012

Surface & Interface Analysis

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“…The emission of a sample material is strong, and a crater is formed in the bombarded material. 35,44,46 In contrast to small cluster bombardment, the impact of large particles can stimulate ejection also by very gentle interactions. For instance, in DESI, the molecules are removed by an impact of micrometer-sized droplets composed of particles having kinetic energy in the submillielectronvolt energy range.…”

Section: Introductionmentioning

confidence: 99%

Microscopic Insight into the Sputtering of Thin Polystyrene Films on Ag{111} Induced by Large and Slow Ar Clusters

et al. 2007

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Molecular dynamics computer simulations were employed to model the bombardment of Ag{111} covered with a monolayer of sec-butyl-terminated polystyrene tetramer (PS4) molecules by the impact of large and slow clusters. The investigated surface was bombarded with clusters composed of between hundreds to 29 000 Ar atoms having a very low kinetic energy per atom (0.1−40 eV). The sputtering yield of molecular species and their internal, angular, and kinetic energy distributions were analyzed. The simulations demonstrated quite clearly that the physics of ejection by these large and slow clusters is distinct from the ejection events stimulated by the popular SIMS clusters, C60, Au3, and SF5.

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“…One more advantage is a high smoothing efficiency at oblique angles (~ 85 o incident angles) that makes cluster beams an exclusive tool for smoothing and polishing of side walls of various trenches or vertical pillars (Fig. 37) on the micron or submicron scale [34,335]. It is important that cluster smoothing does not have a negative effect on the surface mechanical properties.…”

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confidence: 99%

Cluster–surface interaction: From soft landing to implantation

Popok

Barke

Campbell

et al. 2011

Surface Science Reports

245

197

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The current paper presents a state-of-the-art review in the field of interaction of atomic and molecular clusters with solids. We do not attempt to overview the entire broad field, but rather concentrate on the impact phenomena: how the physics of the cluster-surface interaction depends on the kinetic energy and what effects are induced under different energetic regimes. The review starts with an introduction to the field and a short history of cluster beam development. Then fundamental physical aspects of cluster formation and the most common methods for the production of cluster beams are overviewed. For cluster-surface interactions, one of the important scenarios is the low-energy regime where the kinetic energy per atom of the accelerated cluster stays well below the binding (cohesive) energy of the cluster constituents. This case is often called This is the peer-reviewed author's version of a work that was accepted for publication in Surface Science Reports. Changes resulting from the publishing process, such as editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version

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Molecular dynamics simulations of surface smoothing and sputtering process with glancing-angle gas cluster ion beams

Cited by 14 publications

References 7 publications

Surface sputtering with nanoclusters: the relevant parameters

Surface sputtering with nanoclusters: the relevant parameters

Microscopic Insight into the Sputtering of Thin Polystyrene Films on Ag{111} Induced by Large and Slow Ar Clusters

Cluster–surface interaction: From soft landing to implantation

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