Molybdenum–silicon aperiodic multilayer broadband polarizer for 13–30nm wavelength range

Тан, Мьо; Zhu, Jun; Chen, L.Y.; Wang, Z.S.; Guen, Karine Le; Jonnard, Philippe; Giglia, Angelo; Mahne, Nicola; Nannarone, Stefano

doi:10.1016/j.nima.2011.07.007

Cited by 11 publications

(7 citation statements)

References 18 publications

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“…In the nondominated solutions of the 20000th generation, we chose the solution having smallest value of f 2 , and according to the variation trends of function values of f 2 and f 4 , we set f 2r = 10 −5 and f 4r = 0.0025 in Eq. (10) to form the desired solution I with the coordinates (0.3364, 0.00001, 0.9984, 0.0025) as shown in Fig. 1.…”

Section: Global Optimization Of Euv Multilayer Polarizer Using Mogamentioning

confidence: 99%

“…[7,8] We realize this multilayer design is an issue of multi-objective optimization, which requires to simultaneously optimize the reflectivity throughput, polarization degree and flatness of reflectivity profile. Furthermore, the layer thickness fluctuation is inevitable in the multilayer fabrication process, and the broadband reflectivity is sensitive to the layer thickness errors, [9,10] thus the robust multilayer design must be an additional objective. As a result, the comprehensive design of EUV broadband polarizer requires the optimizations of four targets.…”

Section: Introductionmentioning

confidence: 99%

“…Until now, the traditional method of EUV multilayer design is to convert all objectives into a single goal by optimizing the summation of different merit functions, [10,12,15] and presetting the aimed reflectivity as a constant, it is hard for this method to disclose the relations between objectives, and sometimes it is even impossible to supply a proper weight between the objectives and explore the potential ability of the multilayer system. Furthermore, an advanced optimization technique is very important for the design of multilayered coating in other wavelength range, [16] and multi-objective optimization is also needed in the designs of optical coatings.…”

Section: Introductionmentioning

confidence: 99%

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Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Kuang

Wang

et al. 2022

Chinese Phys. B

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With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multiobjective genetic algorithms is theoretically proposed. Owing to the multiobjective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the 4D objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multiobjective genetic algorithm with reference direction. Comparing with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.

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Section: Global Optimization Of Euv Multilayer Polarizer Using Mogamentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Kuang

Wang

et al. 2022

Chinese Phys. B

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“…BEAR equipment permits optical spectroscopic study of the interfaces of multilayer systems [10,11,12], of anisotropic systems [13], and it is prepared for the characterization of polarizers [9,14].…”

Section: Experimental Techniquesmentioning

confidence: 99%

Polarizers tuned at key far-UV spectral lines for space instrumentation

et al. 2017

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Polarimetry is a valuable technique to help us understand the role played by the magnetic field of the coronal plasma in the energy transfer processes from the inner parts of the Sun to the outer space. Polarimetry in the far ultraviolet (FUV: 100-200 nm), which must be performed from space due to absorption in terrestrial atmosphere, supplies fundamental data of processes that are governed by the Doppler and Hanle effects on resonantly scattered line-emission. To observe these processes there are various key spectral lines in the FUV, from which H I Lyman α (121.6 nm) is the strongest one. Hence some solar physics missions that have been proposed or are under development plan to perform polarimetry at 121.6 nm, like the suborbital missions CLASP I (2015) and CLASP II (2018), and the proposed solar missions SolmeX and COMPASS and stellar mission Arago. Therefore, the development of efficient FUV linear polarizers may benefit these and other possible future missions. C IV (155 nm) and Mg II (280 nm) are other spectral lines relevant for studies of solar and stellar magnetized atmospheres.High performance polarizers can be obtained with optimized coatings. Interference coatings can tune polarizers at the spectral line(s) of interest for solar and stellar physics. Polarizing beamsplitters consist in polarizers that separate one polarization component by reflection and the other by transmission, which enables observing the two polarization components simultaneously with a single polarizer. They involve the benefit of a higher efficiency in collection of polarization data due to the use of a single polarizer for the two polarization components and they may also facilitate a simplified design for a space polarimeter. We present results on polarizing beamsplitters tuned either at 121.6 nm or at the pair of 155 and 280 nm spectral lines.

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“…In this work, we explored the possibility of designing broadband EUV QWPs of the transmission type using aperiodic multilayer structures, which have been widely applied in the design of broadband EUV optical elements, such as reflective mirrors [25,26], polarizers [27,28], phase retarders [29,30], analyzers [31], and the attosecond compressor [32][33][34]. We chose transmission over reflective EUV QWPs in the design because a large phase shift is hard to realize using a multilayer structure under reflective conditions [21].…”

Section: Introductionmentioning

confidence: 99%

Design of broadband transmission quarter-wave plates for polarization control of isolated attosecond pulses

Chen

Lin

Gao

2015

J. Opt.

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Using a standard Levenberg-Marquardt algorithm, broadband quarter-wave plates (QWPs) with bandwidth from 3 to 18 eV in the extreme ultraviolet (EUV) region were designed using aperiodic Mo/Si multilayers. By analyzing the design results of the Mo/Si multiayers with different bilayer numbers, we found that a Mo/Si multilayer with more bilayers can achieve broader phase control, but suffers from lower total throughput and a degree of circular polarization. In addition, the pulse broadenings caused by the group delay dispersions of the designed broadband QWPs were studied, and their layer distributions were investigated. The oscillating distribution of bilayer thickness in optimized multilayers was observed, which is considered to be the reason for forming the broadband phase control. Such broadband QWPs can be applied to generate a circularly polarized broadband EUV source, such as isolated attosecond pulse, directly from a linearly polarized source.

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Molybdenum–silicon aperiodic multilayer broadband polarizer for 13–30nm wavelength range

Cited by 11 publications

References 18 publications

Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Polarizers tuned at key far-UV spectral lines for space instrumentation

Design of broadband transmission quarter-wave plates for polarization control of isolated attosecond pulses

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