1998
DOI: 10.1016/s0040-6090(98)00848-7
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Monitoring laser-induced microstructural changes of thin film hydrogenated amorphous carbon (a-C:H) using Raman spectroscopy

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Cited by 28 publications
(21 citation statements)
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“…This is a non-destructive technique, as long as the photon flow is sufficiently low. It is very important to control this effect when measuring Raman spectra of amorphous thin films, especially highly hydrogenated ones, as some published Raman plasma-produced a-C:H are in fact spectra of annealed film upon the application of the Raman laser (Lamberton et al 1998). …”
Section: Raman Spectroscopymentioning
confidence: 99%
“…This is a non-destructive technique, as long as the photon flow is sufficiently low. It is very important to control this effect when measuring Raman spectra of amorphous thin films, especially highly hydrogenated ones, as some published Raman plasma-produced a-C:H are in fact spectra of annealed film upon the application of the Raman laser (Lamberton et al 1998). …”
Section: Raman Spectroscopymentioning
confidence: 99%
“…Micro Raman spectroscopy was used to obtain information concerning the structure transitions within the irradiated areas [12,13]. Raman spectra were recorded in 1808 -backscatter geometry (on samples oriented perpendicularly to the excitation beam direction (z) with a DILOR XY-triple spectrometer, equipped with a liquid nitrogen cooled CCD-multichannel detector and an adapted Olympus microscope in a confocal mode.…”
Section: Gi-xrd Sem and Raman Characterization; Optical Propertiesmentioning
confidence: 99%
“…All these changes can be interpreted from the sp 3 / sp 2 bonding ratio of the sputtered a-C structure. 4,[14][15][16][17][18] The relative sp 3 / sp 2 bonding ratio of sputtered a-C film can also be analyzed from XPS C 1s spectrum. Both the G peak and D peak are incurred by the graphitic vibrations.…”
Section: A Film Properties and Microstructuresmentioning
confidence: 99%