2019
DOI: 10.1109/jeds.2019.2898697
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Monitoring of FinFET Characteristics Using $\Delta V_{\text{DIBLSS}}/(I_{\text{on}}/I_{\text{off}})$ and $\Delta V_{\text{DIBL}}/(I_{\text{on}}/I_{\text{off}})$

Abstract: In this paper, we present a descriptive analysis of a performance index, V DIBLSS /(I on /I off), used for performance monitoring. Scaled n-and p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) (planar and FinFET devices) are included for comparison of performance trends. Also, the simplified V DIBL /(I on /I off) for monitoring the electrical characteristics of MOSFET devices is proposed due to the "quick measurements" required in the last step of the semiconductor manufacturing process. … Show more

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Cited by 3 publications
(1 citation statement)
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“…According to the results obtained in our characterization, we note that the performance ratio must be higher than 10 6 [7]. In this simulation, we note that the performance ratio is higher than 10 6 therefore, both structures are a good candidate as devices for circuits applications.…”
Section: Resultssupporting
confidence: 65%
“…According to the results obtained in our characterization, we note that the performance ratio must be higher than 10 6 [7]. In this simulation, we note that the performance ratio is higher than 10 6 therefore, both structures are a good candidate as devices for circuits applications.…”
Section: Resultssupporting
confidence: 65%