“…Ultrawide‐bandgap semiconductors, including AlN, BN, and diamond, are critical for applications in next‐generation high‐power, high‐frequency electronics, ultraviolet (UV) optoelectronics, high‐power photonics, and quantum devices and systems. [ 1–10 ] Progress in these fields, however, has been severely limited by the lack of scalable substrate, the presence of large densities of defects, and the extremely poor current conduction. [ 3,11,12 ] Moreover, it has remained challenging to achieve a precise control of impurity incorporation and defect formation in these ultrawide‐bandgap semiconductors, severely limiting their structural, electronic, optical, and quantum properties.…”