Monolithic 3-Axis MEMS Multi-Loop Magnetometer: A Performance Analysis

Marra, Cristiano R.; Gadola, Marco; Laghi, Giacomo; Gattere, Gabriele; Langfelder, Giacomo

doi:10.1109/jmems.2018.2846781

Cited by 18 publications

(6 citation statements)

References 19 publications

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“…The measurement setup is similar in [20], [21], [22] with the difference that no voltage driving is used. Next, [5], [23] use the lock-in amplifier only to demodulate the output of the sensor, as the current reference is generated by an oscillator. Finally, the works in [24], [25] use the lock-in amplifier to close the loop and generate the voltage driving, but not the current biasing, which is performed at DC as a result of a different device design approach: the device under test does not use capacitive readout but thermal-piezoresistive amplification.…”

Section: Lorentz-force Mems Magnetometers Measurement: State-of-the-artmentioning

confidence: 99%

A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers

Sanchez-Chiva

Valle

Fernandez

et al. 2021

IEEE Open J. Circuits Syst.

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Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and modulations. However, during the standalone characterization of such MEMS devices, a great variety of instruments and strategies are used, making it very complex to compare results from different works in the literature. For this reason, this article proposes a test setup to characterize Lorentz-force MEMS magnetometers. The proposed setup is based around the use of an impedance analyzer for the driving of voltage and Lorentz-current of the MEMS in-phase and in quadrature, which allows the device Amplitude Modulation and Frequency Modulation characterization. The proposed solution is validated by using the designed circuit to characterize two CMOS-MEMS magnetometers with very different characteristics.

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Section: Lorentz-force Mems Magnetometers Measurement: State-of-the-artmentioning

confidence: 99%

A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers

Sanchez-Chiva

Valle

Fernandez

et al. 2021

IEEE Open J. Circuits Syst.

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show abstract

“…The performance and accuracy of MEMS IMUs are affected by several parameters, such as temperature, ambient vibrations, and acoustic noise [ 11 , 12 , 13 , 14 ]. However, regulating their temperature is complex and challenging [ 12 , 15 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Din

Iqbal

Park

et al. 2022

Sensors

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The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-heater and a control system exploiting PID/PWM were used to compensate for the bias stability variations of a commercial MEMS IMU from BOSCH “BMI 088”. A micro-heater made of gold (Au) thin film is integrated with the commercial MEMS IMU chip. A custom-designed micro-machined glass platform thermally isolates the MEMS IMU from the ambient environment and is vacuum sealed in the leadless chip carrier (LCC) package. The BMI 088 built-in temperature sensor is used for temperature sensing of the device and the locally integrated heater. The experimental results reveal that the bias repeatability of the devices has been improved significantly to achieve the target specifications, making the commercial devices suitable for navigation. Furthermore, the effect of vacuum-packaged and non-vacuum-packaged devices was compared. It was found that the bias repeatability of vacuum-packaged devices was improved by more than 60%.

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“…The existing magnetic sensing technology is listed in Fig. 1a, where uniform field sensors are converted to gradient fields, to compare it to this work 1,2,[4][5][6][7][8][9][11][12][13][14][15][16][17][18][19] . A gradient configuration is commonly, used where two magnetometers (sensitive to uniform magnetic fields) are arranged such that the two sensors are spaced some distance apart, as shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

“…Microelectromechanical system (MEMS) sensing technology offers many attractive advantages, such as a small size, low cost, and scalable fabrication. Several magnetic sensing mechanisms have been investigated, where the most common leverage is the Lorentz force or an MEMS compass design [11][12][13][14][15][16][17][18][19] . The best of the Lorentz force magnetometers (further details in Supplementary Table 1) achieves a resolution of 3.5 nT at 400 kHz (ref.…”

Section: Introductionmentioning

confidence: 99%

100 pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer

et al. 2020

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Magnetic sensing is present in our everyday interactions with consumer electronics and demonstrates the potential for the measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the many benefits of microelectromechanical system (MEMS) devices to fabricate a small, low-power, and inexpensive sensor whose resolution is in the range of biomagnetic fields. At present, biomagnetic fields are measured only by expensive mechanisms such as optical pumping and superconducting quantum interference devices (SQUIDs), suggesting a large opportunity for MEMS technology in this work. The prototype fabrication is achieved by assembling micro-objects, including a permanent micromagnet, onto a postrelease commercial MEMS accelerometer using a pick-and-place technique. With this system, we demonstrate a room-temperature MEMS magnetic gradiometer. In air, the sensor's response is linear, with a resolution of 1.1 nT cm −1 , spans over 3 decades of dynamic range to 4.6 µT cm −1 , and is capable of off-resonance measurements at low frequencies. In a 1 mTorr vacuum with 20 dB magnetic shielding, the sensor achieves a 100 pT cm −1 resolution at resonance. This resolution represents a 30-fold improvement compared with that of MEMS magnetometer technology and a 1000-fold improvement compared with that of MEMS gradiometer technology. The sensor is capable of a small spatial resolution with a magnetic sensing element of 0.25 mm along its sensitive axis, a >4-fold improvement compared with that of MEMS gradiometer technology. The calculated noise floor of this platform is 110 fT cm −1 Hz −1/2 , and thus, these devices hold promise for both magnetocardiography (MCG) and magnetoencephalography (MEG) applications.

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Monolithic 3-Axis MEMS Multi-Loop Magnetometer: A Performance Analysis

Cited by 18 publications

References 19 publications

A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers

A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

100 pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer

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