Monolithic integration of microfluidic channels and optical waveguides in silica on silicon

Friis, Peter; Hoppe, Karsten; Leistiko, Otto; Mogensen, Klaus Bo; Hübner, Jörg; Kutter, Jörg Peter

doi:10.1364/ao.40.006246

Cited by 76 publications

(58 citation statements)

References 17 publications

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“…Such circuits are typically fabricated utilizing processes such as multistep lithography or imprinting. Variances employing dif-ferent materials have been proposed, including doped silicon dioxide waveguides connected to silicon microchannels [1], glass-based microfluidic devices fitted with inserted etched optical fibers [2], PDMS microfluidic channels integrated with PDMS waveguides of higher refractive index [3], and polymer-based microchannels coupled with SU-8 waveguides [4]. Reduction of the channel size in such devices is problematic due to clogging issues, hence increasing the complexity of single cell detection devices by requiring flow management concepts such as flow hydrodynamical [4,5] or electrokinetical [2] focusing for uniformity of cell positioning in the channel.…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional opto-fluidic devices fabricated by ultrashort laser pulses for high throughput single cell detection and processing

et al. 2009

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Three-dimensional flow-through microchannels were fabricated inside bulk fused silica glass via ultrashort pulsed laser direct writing. The device fabrication sequence takes advantage of the nonlinear volumetric absorption in glass and the subsequent preferential chemical etching process. Optical waveguides were also written into the glass specimen and integrated with the fluidic conduits. Flow tests using both fluorescent particles and red blood cells (RBCs) were conducted on various three-dimensional channel configurations. Experiments showed the possibility for laser-induced cell processing inside the microchannels. To evaluate cytometer functionality, RBCs were detected inside the manufactured microchannel via both transmission and fluorescence probing.PACS

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Section: Introductionmentioning

confidence: 99%

Three-dimensional opto-fluidic devices fabricated by ultrashort laser pulses for high throughput single cell detection and processing

et al. 2009

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“…Metal-tagget objects to be counted biological and chemical sensing [14,[20][21]. We have conducted 3-D simulations by using BeamProp software in order to provide the optimized design with high sensitivity.…”

Section: Rtp Substrate Rtp Substratementioning

confidence: 99%

OPTICAL PLANAR WAVEGUIDE SENSOR BASED ON (Yb,Nb):RTP/RTP(001) SYSTEM FOR THE ESTIMATION OF METAL COATED CELLS

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et al. 2016

Collection of Selected Papers of the II International Conference on Information Technology and Nanotechnology

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“…The design and fabrication of such systems have been broadly researched and reported [1]- [3]. In an integrated system, the optical detection can be implemented by using either optical fibers [4], [5] or planar waveguides [6], [7]. Though the fabrication of a polymeric waveguide is relatively easy, the fiber alignment of the waveguide to the light source and detector components is crucial.…”

Section: Introductionmentioning

confidence: 99%

A Spectroscopic Technique for Local Temperature Measurement in a Micro-Optofluidic System

et al. 2016

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• A submitted manuscript is the version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publicationGeneral rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal. Abstract-We present a spectroscopy technique to measure temperature locally in a polydimethylsiloxane (PDMS) microoptofluidic chip with integrated optical fibers and minimal optical components. The device was fabricated in one step with fiber coupler grooves followed by manual integration of the optical fibers. The experimental setup consists of a microoptofluidic chip with a pair of optical fibers for excitation and fluorescence collection, a laser module and a spectrometer. The laser module is coupled to one of the optical fibers to guide the light into the microchannel. The fluorescence signal is collected by a second integrated optical fiber placed orthogonally. A spectroscopy technique is used to measure the local temperature in a microchannel (500 µm wide and 125 µm in height) using Rhodamine B as a temperature indicator. It is shown that for a flow rate between 200 and 400 μL/min, the local temperature can be determined.

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Monolithic integration of microfluidic channels and optical waveguides in silica on silicon

Cited by 76 publications

References 17 publications

Three-dimensional opto-fluidic devices fabricated by ultrashort laser pulses for high throughput single cell detection and processing

Three-dimensional opto-fluidic devices fabricated by ultrashort laser pulses for high throughput single cell detection and processing

OPTICAL PLANAR WAVEGUIDE SENSOR BASED ON (Yb,Nb):RTP/RTP(001) SYSTEM FOR THE ESTIMATION OF METAL COATED CELLS

A Spectroscopic Technique for Local Temperature Measurement in a Micro-Optofluidic System

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