Monomer methylmethacrylate (MMA) incorporated hybrid low-k thin films

Joshi, Bhavana; Mahajan, Ashok M.

doi:10.1007/s13391-013-2183-6

Cited by 4 publications

(1 citation statement)

References 21 publications

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“…18 Furthermore, the increase of carbon incorporation in the film decreased surface state density, and thus reduced leakage current. 19 As reported by Joshi et al, 20 when the annealing temperatures were increased, carbon composition decreased with a rise in interface trap density and border trap charge density, thus resulting in a subsequent increase in leakage currents. These results show a similar trend with the I-V properties of our SiCOH films.…”

Section: Article Hydrocarbon Incorporation Effect On the Electrical Pmentioning

confidence: 67%

Hydrocarbon Incorporation Effect on the Electrical Properties of Low Dielectric Constant SiCOH Films Deposited with Tetrakis(trimethylsilyloxy)silane and Cyclohexane Precursors

Kim

Kang

Seo

et al. 2015

Bulletin Korean Chem Soc

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SiCOH films containing hydrocarbon porogens were prepared using a plasma enhanced chemical vapor deposition system. Their chemical and electrical properties were characterized with various hydrocarbon incorporations. The hydrocarbon incorporation of SiCOH films was estimated using Fourier transform infrared absorption spectra by calculating the peak ratio of hydrocarbon related peaks and Si-O peaks. Thereafter, changes seen in current-voltage (I-V) curves were explained by defect states in the interface of films related with the variation of hydrocarbon incorporation by deposition and/or by postdeposition annealing.

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Section: Article Hydrocarbon Incorporation Effect On the Electrical Pmentioning

confidence: 67%