Herein, the growth and fabrication of BeMgZnO/ZnO heterostructure field-effect transistors (HFETs) are reported on, as well as their direct current (DC) and radio frequency (RF) characterization. With a high 2D electron gas density of %8 Â 10 12 cm À2 , made possible by BeO and MgO coalloying in the barrier, typical drain currents of 0.24 A mm À1 are obtained in Zn-polar BeMgZnO/ZnO HFETs with a Be content of 2-3% and a Mg content below 30%. Typical on/off current ratios above 10 4 , transconductance values of %50 mS mm À1 , and current-gain cutoff frequencies f T of 5.0 GHz, the highest among ZnO-based FETs, are achieved in devices with a gate length of 1.5 μm using Al 2 O 3 as the gate dielectric. An average electron velocity above 1 Â 10 7 cm s À1 , deduced from the bias-dependent cutoff frequency and extraction of transit time under the gate, suggests that even with relatively long gate lengths the average electron velocity is near the theoretical limit (3.5 Â 10 7 cm s À1) of the high peak velocity in ZnO.