Monte Carlo simulation of energy loss of electrons backscattered from solid surfaces

Novák, Mihály

doi:10.1016/j.susc.2008.02.008

Cited by 21 publications

(22 citation statements)

References 23 publications

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“…We observe a very good qualitative as well as quantitative agreement, better than the agreement obtained with the models in Ref. [14][15][16]. The first loss peak is almost perfectly modeled for all three energies.…”

Section: Resultssupporting

confidence: 68%

“…Unfortunately, until now the software is not available and the equations are quite complex. Novák has used [16] a semiclassical expression derived by Li et al [17] for the position dependent differential inelastic cross section. Although simulated spectra systematically underestimated experimental results, the agreement is quite good.…”

Section: Introductionmentioning

confidence: 99%

“…Our goal is to obtain simulation of REELS spectra (including multiple losses) with the dielectric function of the medium as only input in the calculations and thus without introducing any fitting or external parameters as it is also the case for the models in Ref. [14][15][16]. In the following, we describe the various ingredients of the model and the principles of the simulation and we compare our REELS simulated spectra with experimental spectra previously acquired.…”

Section: Introductionmentioning

confidence: 99%

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Model for Monte Carlo simulations of reflection electron energy loss spectra applied to Silicon at energies between 300 and 2000 eV

Pauly¹,

Tougaard²

2010

Surface & Interface Analysis

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We present a new model for Monte Carlo (MC) simulation of reflection electron energy loss spectra (REELS). In the model we divide the depths into surface and bulk regions. For the surface region we calculate the energy loss from a dielectric response theory using the QUEELS-ε(k,ω)-REELS software while the excitations for larger depths are calculated with an MC simulation using the bulk cross section evaluated for an infinite medium. In this model, we take into account bulk excitations, surface excitations, the coupling between surface and bulk excitations (Begrenzungs effect), i.e. the variation of the bulk inelastic cross section in the surface region and the interference as well as the multiple scattering effects. Elastic scattering cross sections are obtained from the ELSEPA code. We perform simulations for a silicon target and for energies between 300 and 2000 eV and compare these to experimental spectra. A very good quantitative agreement is found for a range of energy losses up to 150 eV.

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Section: Resultssupporting

confidence: 68%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Model for Monte Carlo simulations of reflection electron energy loss spectra applied to Silicon at energies between 300 and 2000 eV

Pauly¹,

Tougaard²

2010

Surface & Interface Analysis

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“…An improved model with the correct asymptotic properties valid over all angular orientations of the electron trajectory is available 96 but with the cost of a substantial increase in computation. 97 Although a separation of bulk and surface losses is not strictly correct, the KWT model offers a first approximation to the effect of surface losses upon the DCS. Specifically, the terms including Im À1=eðx; kÞ f grepresent energy losses to bulk excitations whereas those including Im À1=½eðx; kÞ f þ1g represent energy losses to surface excitations.…”

Section: B Near Surface Regionmentioning

confidence: 99%

Simple model of bulk and surface excitation effects to inelastic scattering in low-energy electron beam irradiation of multi-walled carbon nanotubes

Kyriakou

Emfietzoglou

García-Molina

et al. 2011

Journal of Applied Physics

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The effect of bulk and surface excitations to inelastic scattering in low-energy electron beam irradiation of multi-walled carbon nanotubes (MWNTs) is studied using the dielectric formalism. Calculations are based on a semiempirical dielectric response function for MWCNTs determined by means of a many-pole plasmon model with parameters adjusted to available experimental spectroscopic data under theoretical sum-rule constrains. Finite-size effects are considered in the context of electron gas theory via a boundary correction term in the plasmon dispersion relations, thus, allowing a more realistic extrapolation of the electronic excitation spectrum over the whole energy-momentum plane. Energy-loss differential and total inelastic scattering cross sections as a function of electron energy and distance from the surface, valid over the energy range $50-30,000 eV, are calculated with the individual contribution of bulk and surface excitations separated and analyzed for the case of normally incident and escaping electrons. The sensitivity of the results to the various approximations for the spatial dispersion of the electronic excitations is quantified. Surface excitations are shown to have a strong influence upon the shape and intensity of the energy-loss differential cross section in the near surface region whereas the general notion of a spatially invariant inelastic mean free path inside the material is found to be of good approximation.

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“…The inclusion of surface excitations implies a modification of the sampling algorithm in the vicinity of the surface (typically 15 Å above and below the surface), as schematically shown in Figure 1. Technical details on the implementation of the algorithm for the simulation of surface energy losses can be found elsewhere in great detail [ 30,31,50]. Here the focus is on the effect of surface excitations on the reflection-electron-energy-loss spectrum (REELS).…”

Section: Monte-carlo Simulation Of Electron Energy-loss Spectramentioning

confidence: 99%

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

Salvat–Pujol¹,

Valentí²,

Werner³

2016

Nano Online

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The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few keV and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.

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Monte Carlo simulation of energy loss of electrons backscattered from solid surfaces

Cited by 21 publications

References 23 publications

Model for Monte Carlo simulations of reflection electron energy loss spectra applied to Silicon at energies between 300 and 2000 eV

Model for Monte Carlo simulations of reflection electron energy loss spectra applied to Silicon at energies between 300 and 2000 eV

Simple model of bulk and surface excitation effects to inelastic scattering in low-energy electron beam irradiation of multi-walled carbon nanotubes

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments

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