IntroductionUltrafast all-optical switches will be crucially important in future photonic networks. Semiconductor all-optical switches are superior to those based on the optical nonlinearities in optical fibers or ferroelectric materials from the viewpoints of cost, size, integration, stability, and latency. However, patterneffect-free operation above 100 Gbs −1 is extremely difficult to achieve in conventional semiconductor optical switches based on semiconductor optical amplifiers (SOAs) or electro-absorption modulators (EAMs), since the response time is limited by the carrier lifetime (>10 ps). On the other hand, the intersubband (ISB) relaxation time, which is governed by the electron scattering time due to the longitudinal-optical (LO) phonons, is less than 10 ps [1]. Therefore, pattern-effect-free Tbs −1 operation is expected in optical switches based on the saturation of ISB absorption. The near-infrared (1.3-1.55 µm) intersubband transitions (ISBT) have been realized in InGaAs-based coupled quantum wells (CQW) [2,3], CdS/ZnSe/BeTe multiple quantum wells (MQWs) [4], and GaN/Al(Ga)N MQWs [5-9]. The GaN-based ISBT switch is the fastest because of the strong Fröhlich interaction between electrons and LO phonons [10,11]. A 10-dB switching with a gate width of as short as 230 fs has been achieved in a waveguide-type GaN ISBT switch [12]. Ultrafast optical modulation corresponding to 1.5 Tbs −1 has also been demonstrated [13].In this chapter, theoretical models concerning the ISBT in nitride MQWs are described. First, the basic physics of ISBT is summarized in Section 11.2. Section 11.3 concerns the calculation of absorption spectra in GaN/AlN MQWs, where the effects of strong built-in fields (∼ MV cm −1 ) due to the piezoelectric effect and the spontaneous polarization were taken into consideration. In Section 11.4, a finite-difference time-domain (FDTD) simulator of waveguidetype GaN/AlN ISBT switches is presented.