Morphological and Photoluminescence analysis of Zinc Oxide thin films deposited by RF sputtering at different substrate temperatures

Ghosh, Subhojit; Das, Kailash Chandra; Tripathy, N.; Bose, G.; Lee, T; Myoung, Jae Min; Kar, Jyoti Prakash

doi:10.1088/1757-899x/75/1/012023

Cited by 2 publications

(4 citation statements)

References 6 publications

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“…Table 2 summarized the numerical values of the effect of the substrate temperature on thin films results. It can be concluded that the grain size of films increased with increasing of temperature [14]. The best values for grain Size and RMS roughness was noted at preparation temperature of 250 o C.…”

Section: Afm Resultsmentioning

confidence: 84%

“…Additionally, it was noted that when the temperature is raising to 300 °C (curve c), the peaks shape become sharper with higher intensity. Then, from XRD results it [14].…”

Section: Resultsmentioning

confidence: 99%

“…On the other hand, the present of another metal in the film structure that prepared by PLD may be work on supporting the electrical and optical properties of prepared thin films and then the sensing process. Many others pointed to that the gas sensor performance is strongly dependent on the chemical composition and physical specification of the gas sensor [12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

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Manufacturing of Bi-functional Nano-sensor of Nobel Metal for Hydrocarbon Gas Detection in Petroleum Sector Using Pulse Laser Deposition Technique

Sukkar¹,

Kadhim²,

Falih³

2017

ETJ

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In the present investigation bi-functional nano-gas-sensor was manufactured from two types of metals: ZnO metal oxide and Pt noble metal. The nano-gas-sensors were designed for monitoring and control the environmental pollution in petroleum sector. The preparation technique was carried out by design and construction of a pulse laser deposition unit (PLD) with Nd: YAG laser (λ=532nm, laser fluence 2 J/cm2, repetition rate 6 Hz and the pulse duration 7ns). The target was pure ZnO and Pt:ZnO that containing 4%wt Pt. The hexachloroplatinic acid (H 2 PtCl 6 ) was used as Pt source. The PLD films were deposited at three different temperatures 200, 250, and 300 o C. Many characterization tests are used to study the influence of temperature on surface morphology of prepared films: Scanning Electron Microscope (SEM), Atomic Force Microscope (AFM), x-ray Diffraction (XRD) and (UV) visible. The results pointed to a direct relationship between the deposition temperature and the grain sizes of the nanoparticles formed on the substrate. On the other hand, the results of RMS roughness of AFM showed an increased value with increasing of deposition temperature. The best value of RMS roughness was 10.3nm for thin films deposited at 250ºC. The x-ray results shows formation of nanostructure on the substrate at deposition temperature of 250ºC, in which represent high surface area of gas sensor and especially with Pt. In addition, the UV-VIS transmittance measurements have shown that the films are highly transparent in the Visb-NIR wavelength region, with an average transmittance of about 90%. These results pointed to that the manufactured bi-metals nano-gas-sensor (Pt:ZnO) at 250 o C is more suitable for LPG hydrocarbons detection application in petroleum positions.

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Section: Afm Resultsmentioning

confidence: 84%

“…Additionally, it was noted that when the temperature is raising to 300 °C (curve c), the peaks shape become sharper with higher intensity. Then, from XRD results it [14].…”

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Manufacturing of Bi-functional Nano-sensor of Nobel Metal for Hydrocarbon Gas Detection in Petroleum Sector Using Pulse Laser Deposition Technique

Sukkar¹,

Kadhim²,

Falih³

2017

ETJ

View full text Add to dashboard Cite

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“…In the case of the deposition of non-conducting ZnO, a metallic Zn target is usually sputtered in an oxygen atmosphere. In each case, partial pressure is an important process parameter, and usually the target power density does not exceed 10 W/cm 2 [ 2 , 3 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 ]. Controlling the level of oxygen doping during the RF process allows one to control the stoichiometry of the deposited films.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering

et al. 2022

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The paper presents the results of an investigation of the influence of technological parameters on the microstructure, optical, electrical and nanomechanical properties of zinc oxide coatings prepared using the pulsed reactive magnetron sputtering method. Three sets of ZnOx thin films were deposited in metallic, shallow dielectric and deep dielectric sputtering modes. Structural investigations showed that thin films deposited in the metallic mode were nanocrystalline with mixed hexagonal phases of metallic zinc and zinc oxide with crystallite size of 9.1 and 6.0 nm, respectively. On the contrary, the coatings deposited in both dielectric modes had a nanocrystalline ZnO structure with an average crystallite size smaller than 10 nm. Moreover, coatings deposited in the dielectric modes had an average transmission of 84% in the visible wavelength range, while thin films deposited in the metallic mode were opaque. Measurements of electrical properties revealed that the resistivity of as-deposited thin films was in the range of 10−4 Ωcm to 108 Ωcm. Coatings deposited in the metallic mode had the lowest hardness of 2.2 GPa and the worst scratch resistance among all sputtered coatings, whereas the best mechanical properties were obtained for the film sputtered in the deep dielectric mode. The obtained hardness of 11.5 GPa is one of the highest reported to date in the literature for undoped ZnO.

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Morphological and Photoluminescence analysis of Zinc Oxide thin films deposited by RF sputtering at different substrate temperatures

Cited by 2 publications

References 6 publications

Manufacturing of Bi-functional Nano-sensor of Nobel Metal for Hydrocarbon Gas Detection in Petroleum Sector Using Pulse Laser Deposition Technique

Manufacturing of Bi-functional Nano-sensor of Nobel Metal for Hydrocarbon Gas Detection in Petroleum Sector Using Pulse Laser Deposition Technique

Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering

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